Temperature dependence and drift of a thermal accelerometer

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1209-1212

  Dauderstadt, U A ^a   Sarro, P M ^a   Middelhoek, S ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SENSITIVITY ANALYSIS; THERMAL EFFECTS; THERMODYNAMIC PROPERTIES; THERMOPILES;

TEMPERATURE DEPENDENCE; THERMAL ACCELEROMETER; THERMAL DEVICE;

ACCELEROMETERS;

EID: 0030681576     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)