SCOPUS 정보 검색 플랫폼

Volumn 527-529, Issue PART 1, 2006, Pages 21-26

Halide-CVD growth of bulk SiC crystals

Author keywords

Bulk growth; Crystalline quality; Deep traps; Halide CVD; Impurities; Semi insulating crystals; Stoichiometry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GROWTH TEMPERATURE; HALOGENATION; HOLE TRAPS; SILICON CARBIDE; STOICHIOMETRY;

BULK GROWTH; CRYSTALLINE QUALITY; DEEP TRAPS; PHYSICAL VAPOR TRANSPORT TECHNIQUE; SEMI-INSULATING CRYSTALS;

CRYSTAL GROWTH;

EID: 37849014309 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/0-87849-425-1.21 Document Type: Conference Paper

Times cited : (5)

References (19)

1
- 33847510976
- Y.M. Tairov and V.F. Tsvetkov: J. Cryst. Growth Vol. 43 (1978), p. 209
- (1978) J. Cryst. Growth , vol.43 , pp. 209
- Tairov, Y.M.¹ Tsvetkov, V.F.²

2
- 0001608765
- O. Kordina, C. Hallin, A. Ellison, A.S. Bakin, I.G. Ivanov, A. Henry, R. Yakimova, M. Touminen, A. Vehanen and E. Janzėn: Appl. Phys. Lett. Vol. 69 (1996), p. 1456
- (1996) Appl. Phys. Lett , vol.69 , pp. 1456
- Kordina, O.¹ Hallin, C.² Ellison, A.³ Bakin, A.S.⁴ Ivanov, I.G.⁵ Henry, A.⁶ Yakimova, R.⁷ Touminen, M.⁸ Vehanen, A.⁹ Janzėn, E.¹⁰

3
- 0242665541
- Vols
- St.G. Müller, M.F. Brady, W.H. Brixius, R.C. Glass, H.McD. Hobgood, J.R. Jenny, R.T. Leonard, D.P. Malta, A.R. Powell, V.F. Tsvetkov, S.T. Allen, J.W. Palmour and C.H. Carter: Mat. Sci. Forum Vols. 433-436 (2003), p.39
- (2003) Mat. Sci. Forum , vol.433-436 , pp. 39
- Müller, S.G.¹ Brady, M.F.² Brixius, W.H.³ Glass, R.C.⁴ Hobgood, H.M.⁵ Jenny, J.R.⁶ Leonard, R.T.⁷ Malta, D.P.⁸ Powell, A.R.⁹ Tsvetkov, V.F.¹⁰ Allen, S.T.¹¹ Palmour, J.W.¹² Carter, C.H.¹³

4
- 0242665534
- Vols
- A. Ellison, B. Magnusson, N.T. Son, L. Storasta and E. Janzėn: Mat. Sci. Forum Vols. 433-436 (2003), p. 33
- (2003) Mat. Sci. Forum , vol.433-436 , pp. 33
- Ellison, A.¹ Magnusson, B.² Son, N.T.³ Storasta, L.⁴ Janzėn, E.⁵

5
- 20744453248
- Q. Li, A. Polyakov, M. Skowronski, E.K. Sanchez, M.J. Loboda, M.A. Fanton, T. Bogart and R.D. Gamble: J. Appl. Phys. Vol. 97 (2005), p. 113705
- (2005) J. Appl. Phys , vol.97 , pp. 113705
- Li, Q.¹ Polyakov, A.² Skowronski, M.³ Sanchez, E.K.⁴ Loboda, M.J.⁵ Fanton, M.A.⁶ Bogart, T.⁷ Gamble, R.D.⁸

6
- 37849026881
- these proceedings
- Q. Li, A.Y. Polyakov, M. Skowronski, E.K. Sanchez, M.J. Loboda, M.A. Fanton, T. Bogart, D. Gamble, N.B. Smirnov and Yu. Makarov: these proceedings
- Li, Q.¹ Polyakov, A.Y.² Skowronski, M.³ Sanchez, E.K.⁴ Loboda, M.J.⁵ Fanton, M.A.⁶ Bogart, T.⁷ Gamble, D.⁸ Smirnov, N.B.⁹ Makarov, Y.¹⁰

7
- 3142707499
- Q. Li, A.Y. Polyakov, M. Skowronski, M. D. Roth, M. A. Fanton and D.W. Snyder: J. Appl. Phys. Vol. 96 (2004), p. 411
- (2004) J. Appl. Phys , vol.96 , pp. 411
- Li, Q.¹ Polyakov, A.Y.² Skowronski, M.³ Roth, M.D.⁴ Fanton, M.A.⁵ Snyder, D.W.⁶

8
- 21544479762
- H. J. Chung, A.Y. Polyakov, S. W. Huh, S. Nigam, M. Skowronski, M. A. Fanton and B. Weiland: J. Appl. Phys. Vol. 97 (2005), p. 084913
- (2005) J. Appl. Phys , vol.97 , pp. 084913
- Chung, H.J.¹ Polyakov, A.Y.² Huh, S.W.³ Nigam, S.⁴ Skowronski, M.⁵ Fanton, M.A.⁶ Weiland, B.⁷

9
- 25144474905
- S. Nigam, H. J. Chung, A.Y. Polyakov, M. A. Fanton, B.E. Weiland and M. Skowronski: J. Cryst. Growth Vol. 284 (2005), p.112
- (2005) J. Cryst. Growth , vol.284 , pp. 112
- Nigam, S.¹ Chung, H.J.² Polyakov, A.Y.³ Fanton, M.A.⁴ Weiland, B.E.⁵ Skowronski, M.⁶

10
- 37849024440
- M. Fanton, D. Snyder, B. Weiland, R. Cavalero, A. Polyakov, M. Skowronski and H. Chung: J. Cryst. Growth Vol. 287 (2006), p.392
- (2006) J. Cryst. Growth , vol.287 , pp. 392
- Fanton, M.¹ Snyder, D.² Weiland, B.³ Cavalero, R.⁴ Polyakov, A.⁵ Skowronski, M.⁶ Chung, H.⁷

11
- 0022659661
- K. D. Allen and H. H. Sawin: J. Electrochem. Soc, 133 (1986), p. 421
- (1986) J. Electrochem. Soc , vol.133 , pp. 421
- Allen, K.D.¹ Sawin, H.H.²

12
- 37849043247
- these proceedings
- S. Nigam, H.J. Chung, S.W. Huh, J. Grim, A.Y. Polyakov, M.A. Fanton, B. Weiland, D.W. Snyder and M. Skowronski: these proceedings
- Nigam, S.¹ Chung, H.J.² Huh, S.W.³ Grim, J.⁴ Polyakov, A.Y.⁵ Fanton, M.A.⁶ Weiland, B.⁷ Snyder, D.W.⁸ Skowronski, M.⁹

13
- 8644248288
- Vols
- M. Fanton, M. Skowronski, D. W. Snyder, H. J. Chung, S. Nigam, B. Weiland and S. W. Huh: Mater. Sci. Forum Vols. 457-460 (2004), p. 87
- (2004) Mater. Sci. Forum , vol.457-460 , pp. 87
- Fanton, M.¹ Skowronski, M.² Snyder, D.W.³ Chung, H.J.⁴ Nigam, S.⁵ Weiland, B.⁶ Huh, S.W.⁷

14
- 37849031901
- these proceedings
- H.J. Chung, S.W. Huh, A.Y. Polyakov, S. Nigam, Q. Li, J. Grim, M. Skowronski, E.R. Glaser, W.E. Carlos, J.A. Freitas and M.A. Fanton: these proceedings
- Chung, H.J.¹ Huh, S.W.² Polyakov, A.Y.³ Nigam, S.⁴ Li, Q.⁵ Grim, J.⁶ Skowronski, M.⁷ Glaser, E.R.⁸ Carlos, W.E.⁹ Freitas, J.A.¹⁰ Fanton, M.A.¹¹

15
- 21544437524
- D.J. Larkin, P.G. Neudeck, J. A. Powell, and L.G. Matus, Appl. Phys. Lett. Vol. 65 (1994), p. 1659
- (1994) Appl. Phys. Lett , vol.65 , pp. 1659
- Larkin, D.J.¹ Neudeck, P.G.² Powell, J.A.³ Matus, L.G.⁴

16
- 37849045039
- S.W. Huh, H.J. Chung, S. Nigam, A.Y. Polyakov, Q. Li, M. Skowronski, E.R. Glaser, W.E. Carlos, B.V. Shanabrook and M.A. Fanton: submitted to J. Appl. Phys, 2005
- S.W. Huh, H.J. Chung, S. Nigam, A.Y. Polyakov, Q. Li, M. Skowronski, E.R. Glaser, W.E. Carlos, B.V. Shanabrook and M.A. Fanton: submitted to J. Appl. Phys, 2005

17
- 0001280521
- T. Kimoto, A. Itoh, H. Matsunami and T. Okano: J. Appl. Phys. Vol. 81 (1997), p. 3494
- (1997) J. Appl. Phys , vol.81 , pp. 3494
- Kimoto, T.¹ Itoh, A.² Matsunami, H.³ Okano, T.⁴

18
- 0035367945
- J. Zhang, A. Ellison, A. Henry, M.K. Linnarsson and E. Janzėn: J. Cryst. Growth, Vol. 226 (2001), p. 267
- (2001) J. Cryst. Growth , vol.226 , pp. 267
- Zhang, J.¹ Ellison, A.² Henry, A.³ Linnarsson, M.K.⁴ Janzėn, E.⁵

19
- 37849013966
- these proceedings
- S.W. Huh, A.Y. Polyakov, H.J. Chung, S. Nigam, M. Skowronski, E.R. Glaser, W.E. Carlos, M.A. Fanton and N.B. Smirnov: these proceedings
- Huh, S.W.¹ Polyakov, A.Y.² Chung, H.J.³ Nigam, S.⁴ Skowronski, M.⁵ Glaser, E.R.⁶ Carlos, W.E.⁷ Fanton, M.A.⁸ Smirnov, N.B.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.