-
1
-
-
33846276277
-
High Performance CMOSFET Technology for 45nm Generation and Scalability of Stress-Induced Mobility Enhancement Technique
-
A.Oishi, O.Fujii, T.Yokoyama, K.Ota, T.Sanuki, H.Inokuma, K.Eda, T.Idaka, H.Miyajima, S.Iwasa, H.Yamasaki, K.Oouchi, K.Matsuo, H.Nagano, T.Komoda, Y.Okayama, .Matsumoto, K.Fukasaku, T.Shimizu, K.Miyano, T.Suzuki, K.Yahashi, A.Horiuchi, Y.Takegawa, K.Saki, S.Mori, K.Ohno, I.Mizushima, M.Saito, M.Iwai, S.Yamada, N.Nagashima and F.Matsuoka, "High Performance CMOSFET Technology for 45nm Generation and Scalability of Stress-Induced Mobility Enhancement Technique", presented at Electron Devices Meeting, 2005. IEDM '05. Digest. International, 2005, pp. 229-232.
-
(2005)
Electron Devices Meeting, 2005. IEDM '05. Digest. International
, pp. 229-232
-
-
Oishi, A.1
Fujii, O.2
Yokoyama, T.3
Ota, K.4
Sanuki, T.5
Inokuma, H.6
Eda, K.7
Idaka, T.8
Miyajima, H.9
Iwasa, S.10
Yamasaki, H.11
Oouchi, K.12
Matsuo, K.13
Nagano, H.14
Komoda, T.15
Okayama, Y.16
Matsumoto17
Fukasaku, K.18
Shimizu, T.19
Miyano, K.20
Suzuki, T.21
Yahashi, K.22
Horiuchi, A.23
Takegawa, Y.24
Saki, K.25
Mori, S.26
Ohno, K.27
Mizushima, I.28
Saito, M.29
Iwai, M.30
Yamada, S.31
Nagashima, N.32
Matsuoka, F.33
more..
-
2
-
-
84944378006
-
Measurement and modeling of self-heating in SOI nMOSFET's
-
L. T. Su, J. E. Chung, D. A. Antoniadis, K. E. Goodson, and M. I. Flik, "Measurement and modeling of self-heating in SOI nMOSFET's," IEEE Transactions on Electron Devices, vol. 41, pp. 69-75, 1994.
-
(1994)
IEEE Transactions on Electron Devices
, vol.41
, pp. 69-75
-
-
Su, L.T.1
Chung, J.E.2
Antoniadis, D.A.3
Goodson, K.E.4
Flik, M.I.5
-
3
-
-
0032318730
-
New virtual substrate concept for vertical MOS transistors
-
E. Kasper, K. Lyutovich, M. Bauer, and M. Oehme, "New virtual substrate concept for vertical MOS transistors," Thin Solid Films, vol. 336, pp. 319-322, 1998.
-
(1998)
Thin Solid Films
, vol.336
, pp. 319-322
-
-
Kasper, E.1
Lyutovich, K.2
Bauer, M.3
Oehme, M.4
-
4
-
-
1142292408
-
Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer
-
R. Delhougne, P. Meunier-Beillard, M. Caymax, R. Loo, and W. Vandervorst, "Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer," Applied Surface Science, vol. 224, pp. 91-94, 2004.
-
(2004)
Applied Surface Science
, vol.224
, pp. 91-94
-
-
Delhougne, R.1
Meunier-Beillard, P.2
Caymax, M.3
Loo, R.4
Vandervorst, W.5
-
5
-
-
30344467214
-
Growth of strained Si on He ion implanted Si/SiGe heterostructures
-
D. Buca, S. F. Feste, B. Hollander, S. Mantl, R. Loo, M. Caymax, R. Carius, and H. Schaefer, "Growth of strained Si on He ion implanted Si/SiGe heterostructures," Solid-State Electronics, vol. 50, pp. 32-37, 2006.
-
(2006)
Solid-State Electronics
, vol.50
, pp. 32-37
-
-
Buca, D.1
Feste, S.F.2
Hollander, B.3
Mantl, S.4
Loo, R.5
Caymax, M.6
Carius, R.7
Schaefer, H.8
-
6
-
-
33244480559
-
Thermal Stability of a Reverse-Graded SiGe Buffer Layer for Growth of Relaxed SiGe Epitaxy
-
L. H. Wong, J. P. Liu, C. C. Wong, C. Ferraris, T. J. White, L. Chan, D. K. Sohn, and L. C. Hsia, "Thermal Stability of a Reverse-Graded SiGe Buffer Layer for Growth of Relaxed SiGe Epitaxy," Electrochemical and Solid-State Letters, vol. 9, pp. G114-G116, 2006.
-
(2006)
Electrochemical and Solid-State Letters
, vol.9
, pp. G114-G116
-
-
Wong, L.H.1
Liu, J.P.2
Wong, C.C.3
Ferraris, C.4
White, T.J.5
Chan, L.6
Sohn, D.K.7
Hsia, L.C.8
-
7
-
-
0942288635
-
Reduced self-heating in Si/SiGe field-effect transistors on thin virtual substrates prepared by low-energy plasma-enhanced chemical vapor deposition
-
T. Hackbarth, H.-J. Herzog, K.-H. Hieber, U. Konig, M. Bollani, D. Chrastina, and H. Von Kanel, "Reduced self-heating in Si/SiGe field-effect transistors on thin virtual substrates prepared by low-energy plasma-enhanced chemical vapor deposition," Applied Physics Letters, vol. 83, pp. 5464-5466, 2003.
-
(2003)
Applied Physics Letters
, vol.83
, pp. 5464-5466
-
-
Hackbarth, T.1
Herzog, H.-J.2
Hieber, K.-H.3
Konig, U.4
Bollani, M.5
Chrastina, D.6
Von Kanel, H.7
-
8
-
-
0030379801
-
Self-heating effects in SOI MOSFET's and their measurement by small signal conductance techniques
-
B. M. Tenbroek, M. S. L. Lee, W. Redman-White, R. J. T. Bunyan, and M. J. Uren, "Self-heating effects in SOI MOSFET's and their measurement by small signal conductance techniques," IEEE Transactions on Electron Devices, vol. 43, pp. 2240-2248, 1996.
-
(1996)
IEEE Transactions on Electron Devices
, vol.43
, pp. 2240-2248
-
-
Tenbroek, B.M.1
Lee, M.S.L.2
Redman-White, W.3
Bunyan, R.J.T.4
Uren, M.J.5
-
9
-
-
0034227743
-
Fabrication and analysis of deep submicron strained-Si N-MOSFET's
-
K. Rim, J. L. Hoyt, and J. F. Gibbons, "Fabrication and analysis of deep submicron strained-Si N-MOSFET's," IEEE Transactions on Electron Devices, vol. 47, pp. 1406-1415, 2000.
-
(2000)
IEEE Transactions on Electron Devices
, vol.47
, pp. 1406-1415
-
-
Rim, K.1
Hoyt, J.L.2
Gibbons, J.F.3
-
10
-
-
84957924926
-
-
http://public.itrs.net
-
-
-
|