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Volumn 2006-January, Issue , 2006, Pages 97-100

Quantifying self-heating effects in strained Si MOSFETs with scaling

Author keywords

[No Author keywords available]

Indexed keywords

DRAIN CURRENT; HEATING; MOSFET DEVICES; SEMICONDUCTOR ALLOYS; SILICON;

EID: 37749040412     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/essder.2006.307647     Document Type: Conference Paper
Times cited : (11)

References (10)
  • 3
    • 0032318730 scopus 로고    scopus 로고
    • New virtual substrate concept for vertical MOS transistors
    • E. Kasper, K. Lyutovich, M. Bauer, and M. Oehme, "New virtual substrate concept for vertical MOS transistors," Thin Solid Films, vol. 336, pp. 319-322, 1998.
    • (1998) Thin Solid Films , vol.336 , pp. 319-322
    • Kasper, E.1    Lyutovich, K.2    Bauer, M.3    Oehme, M.4
  • 4
    • 1142292408 scopus 로고    scopus 로고
    • Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer
    • R. Delhougne, P. Meunier-Beillard, M. Caymax, R. Loo, and W. Vandervorst, "Development of a new type of SiGe thin strain relaxed buffer based on the incorporation of a carbon-containing layer," Applied Surface Science, vol. 224, pp. 91-94, 2004.
    • (2004) Applied Surface Science , vol.224 , pp. 91-94
    • Delhougne, R.1    Meunier-Beillard, P.2    Caymax, M.3    Loo, R.4    Vandervorst, W.5
  • 7
    • 0942288635 scopus 로고    scopus 로고
    • Reduced self-heating in Si/SiGe field-effect transistors on thin virtual substrates prepared by low-energy plasma-enhanced chemical vapor deposition
    • T. Hackbarth, H.-J. Herzog, K.-H. Hieber, U. Konig, M. Bollani, D. Chrastina, and H. Von Kanel, "Reduced self-heating in Si/SiGe field-effect transistors on thin virtual substrates prepared by low-energy plasma-enhanced chemical vapor deposition," Applied Physics Letters, vol. 83, pp. 5464-5466, 2003.
    • (2003) Applied Physics Letters , vol.83 , pp. 5464-5466
    • Hackbarth, T.1    Herzog, H.-J.2    Hieber, K.-H.3    Konig, U.4    Bollani, M.5    Chrastina, D.6    Von Kanel, H.7
  • 9
    • 0034227743 scopus 로고    scopus 로고
    • Fabrication and analysis of deep submicron strained-Si N-MOSFET's
    • K. Rim, J. L. Hoyt, and J. F. Gibbons, "Fabrication and analysis of deep submicron strained-Si N-MOSFET's," IEEE Transactions on Electron Devices, vol. 47, pp. 1406-1415, 2000.
    • (2000) IEEE Transactions on Electron Devices , vol.47 , pp. 1406-1415
    • Rim, K.1    Hoyt, J.L.2    Gibbons, J.F.3
  • 10
    • 84957924926 scopus 로고    scopus 로고
    • http://public.itrs.net


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.