Sb surface segregation during epitaxial growth of SiGe heterostructures: The effects of Ge composition and biaxial stress

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 15, 2004, Pages

  Portavoce, A ^a,b   Berbezier, I ^a   Gas, P ^b   Ronda, A ^a  

^a CAMPUS DE LUMINY   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; GERMANIUM; SILICON;

ARTICLE; DIFFUSION; ENTHALPY; KINETICS; MASS SPECTROMETRY; STRESS; SURFACE PROPERTY; TEMPERATURE;

EID: 37649032927     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.155414     Document Type: Article

References (22)

1. International Technology Roadmap for Semiconductors-2001, URL http://public.itrs.net/files/2001 itrs
2. D. J. Paul, Thin Solid Films 321, 172 (1998).
3. U. König, M. Zeuner, G. Hock, T. Hackbarth, M. Gluck, T. Ostermann, and M. Saxarra, Solid State Electron. 43, 1383 (1999).
4. E. Kasper, G. Reitemann, in Future Trends in Microelectronics, edited by S. Luryi, J. Xu, and A. Zaslavsky (Wiley, New York, 1999), p. 125.
5. A. Portavoce, F. Bassani, A. Ronda, and I. Berbezier, Surf. Sci. 519, 185 (2002).
6. A. Portavoce, Ph.D. Thesis, University Aix-Marseille, 2002.
7. A. Portavoce et al. (unpublished).
8. Y. H. Luo, J. Wan, R. L. Forrest, J. L. Liu, G. Jin, M. S. Goorsky, and K. L. Wang, Appl. Phys. Lett. 78, 454 (2001).
9. Y. H. Luo, J. Wan, R. L. Forrest, J. L. Liu, M. S. Goorsky, and K. L. Wang, J. Appl. Phys. 89, 8279 (2001).
10. M. Mashita, Y. Hiyama, K. Arai, B.-H. Koo, and T. Yao, Jpn. J. Appl. Phys. 39, 4435 (2000).
11. H. Jorke, Surf. Sci. 193, 569 (1988).
12. S. A. Barnett and J. E. Greene, Surf. Sci. 151, 67 (1985).
13. S. Fukatsu, K. Fujita, H. Yaguchi, Y. Shiraki, and R. Ito, Surf. Sci. 267, 79 (1992).
14. K. Kimura, Y. Endoh, M. Mannami, H.-J. Gossmann, G. H. Gilmer, and L. C. Feldman, Appl. Phys. Lett. 69, 67 (1996).
15. A. Yu. Kuznetsov, J. Cardenas, D. C. Schmidt, and B. G. Svensson, Phys. Rev. B 59, 7274 (1999).
16. A. Nylandsted Larsen and P. Kringhøj, Appl. Phys. Lett. 68, 2684 (1996).
17. P. Kringhøj, A. Nylandsted Larsen, and S. Yu. Shirayev, Phys. Rev. Lett. 76, 3372 (1996).
18. G. Tréglia, B. Legrand, F. Ducastelle, A. Saùl, C. Gallis, I. Meunier, C. Mottet, and A. Senhaji, Comput. Mater. Sci. 15, 196 (1999).
19. G. Pindoria, R. A. A. Kubiak, S. M. Newstead, and D. P. Woodruff, Surf. Sci. 234, 17 (1990).
20. G. G. Jernigan, P. E. Thompson, and C. L. Silvestre, Surf. Sci. 380, 417 (1997).
21. Y.-J. Zheng, A. M. Lam, and J. R. Engstrom, Appl. Phys. Lett. 75, 817 (1999).
22. W. W. Scott Jr., Binary Alloy Phase Diagrams, edited by T. B. Massalski, H. Okamoto, P. R. Subramanian, and L. Kacprzak (ASM International, Materials Park, OH, 1990).