Anomalous surface segregation of Sb in Si during epitaxial growth

Applied Physics Letters

Volumn 69, Issue 1, 1996, Pages 67-69

  Kimura, K ^a   Endoh, Y ^a   Mannami, M ^a   Gossmann, H J ^b   Gilmer, G H ^b   Feldman, L C ^b  

^a KYOTO UNIVERSITY   (Japan)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041891526     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118121     Document Type: Article

References (8)

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