Auger spectroscopy thermodesorption of Sb on Si1-xGex layers grown on Si(1 0 0) substrates

Surface Science

Volumn 519, Issue 3, 2002, Pages 185-191

  Portavoce, A ^a,b   Bassani, F ^a   Ronda, A ^a   Berbezier, I ^a  

^a CAMPUS DE LUMINY   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

Antimony; Auger electron spectroscopy; Germanium; Molecular beam epitaxy; Silicon; Thermal desorption

Indexed keywords

ANTIMONY; AUGER ELECTRON SPECTROSCOPY; MOLECULAR BEAM EPITAXY; SILICON; THERMAL EFFECTS;

THERMAL DESORPTION;

DESORPTION;

EID: 0037058330     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)02125-8     Document Type: Article

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