Sb-enhanced diffusion in strained Si1-xGex: Dependence on biaxial compression

Physical Review B - Condensed Matter and Materials Physics

Volumn 59, Issue 11, 1999, Pages 7274-7277

  Kuznetsov, A Yu ^a,c   Cardenas, J ^a   Schmidt, D C ^a   Svensson, B G ^a   Hansen, J Lundsgaard ^b   Larsen, A Nylandsted ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b AARHUS UNIVERSITY   (Denmark)

^c INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000619221     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.59.7274     Document Type: Article

References (20)

1. N. Moriya, L. C. Feldman, H. S. Luftman, C. A. King, J. Bevk, and B. Freer, Phys. Rev. Lett., 71, 883, (1993).
2. P. Kuo, J. L. Hoyt, J. F. Gibbson, J. E. Turner, R. D. Jacowitz, and T. I. Kamins, Appl. Phys. Lett., 62, 612, (1993).
3. N. E. B. Cowern, P. C. Zalm, D. J. Gravesteijn, and W. B. de Boer, Phys. Rev. Lett., 72, 2585, (1994).
4. P. Kuo, J. L. Hoyt, J. F. Gibbson, J. E. Turner, and D. Lefforge, Appl. Phys. Lett., 66, 580, (1995).
5. P. Kringhøj, A. Nylandsted Larsen, and S. Yu. Shirayev, Phys. Rev. Lett., 76, 3372, (1996).
6. J. W. Matthews and A. E. Blakeslee, J. Cryst. Growth, 27, 118, (1974).
7. R. Hull, in Properties of Strained and Relaxed Silicon Germanium (INSPEC, London, 1995).
8. S. C. Jain, H. E. Maes, K. Pinardi, and I. De Wolf, J. Appl. Phys., 79, 8145, (1996).
9. S. P. Baker and E. Artz, in Properties of Strained and Relaxed Silicon Germanium (INSPEC, London, 1995).
10. A. D. N. Paine, M. Morooka, A. F. W. Willoughby, J. M. Bonar, P. Phillips, M. J. Dowsett, and G. Cooke, Mater. Sci. Forum, 196-201, 345, (1995).
11. A. Nylandsted Larsen and P. Kringhøj, Appl. Phys. Lett., 68, 2684, (1996).
12. D. B. Noble, J. L. Hoyt, J. F. Gibbons, M. P. Scott, S. S. Laderman, S. J. Rosner, and T. I. Kamins, Appl. Phys. Lett., 55, 1978, (1989).
13. A. Yu. Kuznetsov, J. Cardenas, B. G. Svensson, J. Lundsgaard Hansen, and A. Nylandsted Larsen, in Diffusion Mechanisms in Crystalline Materials, edited by Yu. Mishin, G. Vogl, N. Cowern, R. Catlow, and D. Farkas, MRS Symposia Proceedings No. 527 (Materials Research Society, Pittsburgh, 1998), p. 435.
14. S. M. Hu, D. C. Ahlgren, P. A. Ronsheim, and J. O. Chu, Phys. Rev. Lett., 67, 1450, (1991).
15. R. People, Phys. Rev. B, 32, 1405, (1985).
16. P. M. Fahey, P. B. Griffin, and J. D. Plummer, Rev. Mod. Phys., 61, 289, (1989).
17. P. G. Shewmon, Diffusion in Solids (J. Williams Book Company, Jenks, USA, 1983).
18. R. N. Jeffery and D. Lazarus, J. Appl. Phys., 41, 3186, (1970).
19. M. J. Aziz, Appl. Phys. Lett., 70, 2810, (1997).
20. A. Y. U. Kuznetsov, J. Grahn, J. Cardenas, B. G. Svensson, J. Lundsgaard Hansen, and A. Nylandsted Larsen, Phys. Rev. B, 58, R13 335, (1998).