Microcantilever actuation via periodic internal heating

Review of Scientific Instruments

Volumn 78, Issue 12, 2007, Pages

  Lee, Jungchul ^a   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; HEATING; PHOTODETECTORS; RESONANCE; RESONATORS;

ELECTROTHERMAL ACTUATION; MICROCANTILEVER ACTUATION; PERIODIC INTERNAL HEATING;

SILICON SENSORS;

EID: 37649003678     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2818805     Document Type: Article

References (18)

1. G. Binnig, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. L. M. Picco, L. Bozec, A. Ulcinas, D. J. Engledew, M. Antognozzi, M. A. Horton, and M. J. Miles, Nanotechnology 18, 044030 (2007).
3. S. C. Minne, G. Yaralioglu, S. R. Manalis, J. D. Adams, J. Zesch, A. Atalar, and C. F. Quate, Appl. Phys. Lett. 72, 2340 (1998).
4. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M. A. Lantz, H. E. Rothuizen, R. Stutz, and G. K. Binnig, IEEE Trans. Nanotechnol. 1, 39 (2002).
5. K. Salaita, Y. H. Wang, J. Fragala, R. A. Vega, C. Liu, and C. A. Mirkin, Angew. Chem., Int. Ed. 45, 7220 (2006).
6. T. Sulchek, R. Hsieh, J. D. Adams, S. C. Minne, C. F. Quate, and D. M. Adderton, Rev. Sci. Instrum. 71, 2097 (2000).
7. R. Pedrak, T. Ivanov, K. Ivanova, T. Gotszalk, N. Abedinov, I. W. Rangelow, K. Edinger, E. Tomerov, T. Schenkel, and P. Hudek, J. Vac. Sci. Technol. B 21, 3102 (2003).
8. S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995).
9. T. Fujii and S. Watanabe, Appl. Phys. Lett. 68, 467 (1996).
10. B. Rogers, L. Manning, M. Jones, T. Sulchek, K. Murray, B. Beneschott, J. D. Adams, Z. Hu, T. Thundat, H. Cavazos, and S. C. Minne, Rev. Sci. Instrum. 74, 4899 (2003).
11. X. F. Wang, D. A. Bullen, J. Zou, C. Liu, and C. A. Mirkin, J. Vac. Sci. Technol. B 22, 2563 (2004).
12. D. Bullen, X. F. Wang, J. Zou, S. W. Chung, C. A. Mirkin, and C. Liu, J. Microelectromech. Syst. 13, 594 (2004).
13. J. Lee and W. P. King, Sens. Actuators, A 136, 291 (2007).
14. J. Lee, T. Beechem, T. L. Wright, B. A. Nelson, S. Graham, and W. P. King, J. Microelectromech. Syst. 15, 1644 (2006).
15. B. A. Nelson and W. P. King, Sens. Actuators, A 140, 51 (2007).
16. K. Park, J. Lee, Z. M. M. Zhang, and W. P. King, J. Microelectromech. Syst. 16, 213 (2007).
17. J. Lee, F. Goericke, and W. P. King, " Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers., " Sens. Actuators, A (to be published).
18. K. Park, J. Lee, Z. M. Zhang, and W. P. King, Rev. Sci. Instrum. 78, 043709 (2007).