Microstructure and mechanical properties of chromium oxide coatings

Journal of Materials Research

Volumn 22, Issue 12, 2007, Pages 3531-3537

  Pang, Xiaolu ^a,b   Gao, Kewei ^a   Volinsky, Alex A ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^b University of South Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COATINGS; ELASTIC MODULI; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRUCTURE; NANOINDENTATION; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM OXIDE COATINGS; COATING MICROSTRUCTURE; PIN-ON-DISK TESTS; RADIOFREQUENCY REACTIVE MAGNETRON SPUTTERING;

CHROMIUM COMPOUNDS;

EID: 37549064657     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0445     Document Type: Article

References (32)

1. 3 well-crystallized films for high transmittance APSM in ArF line. Microelectron. Eng. 67/68, 17 (2003).
2. E. Sourty, J.L. Sullivan, and M.D. Bijker: Chromium oxide coatings applied to magnetic tape heads for improved wear resistance. Tribol. Int. 36, 389 (2003).
3. P. Hones, M. Diserens, and F. Levy: Characterization of sputter-deposited chromium oxide thin films. Surf. Coat. Technol. 120/121, 277 (1999).
4. 3 into polycrystalline tantalum. Thin Solid Films 302, 266 (1997).
5. B. Bhushan, M.A.S.G. Theumissen, and X. Li: Tribological studies of chromium oxide films for magnetic recording applications. Thin Solid Films 311, 67 (1997).
6. P. Yashar, J. Rechner, M.S. Wong, W.D. Sproul, and S.A. Barnett: High-rate reactive sputtering of yttria-stabilized zirconia using pulsed d.c. power. Surf. Coat. Technol. 94/95, 333 (1997).
7. J.D. Olivas, C. Mireles, E. Acosta, and E.V. Barrera: Surface characterization of plasma spray metal deposition procedures using x-ray photoelectron spectroscopy. Thin Solid Films 299, 143 (1997).
8. I. Ozdemir, C. Tekmen, S.C. Okumus, and E. Celik: Thermal behaviour of plasma-sprayed Mo coating on cast-iron substrate. Surf. Coat. Technol. 174/175, 1064 (2003).
9. A. Forn, J.A. Picas, and M.J. Simon: Mechanical and tribological properties of Al-Si-Mo plasma-sprayed coatings. J. Mater. Process. Technol. 143/144, 52 (2003).
10. 3) overcoat films. J. Appl. Phys. 66, 5315 (1989).
11. G. Contoux, F. Cosset, A. Celerier, and J. Machet: Deposition process study of chromium oxide thin films obtained by d.c. magnetron sputtering. Thin Solid Films 292, 75 (1997).
12. B. Bhushan: Development of r.f. sputtered chromium oxide coating for wear application. Thin Solid Films 64, 231 (1979).
13. E. Andrade, M. Flores, S. Muhl, N.P. Barradas, G. Murillo, E.P. Zavala, and M.F. Rocha: Ion beam analysis of TiN/Ti multilayers deposited by magnetron sputtering. Nucl. Instrum. Methods Phys. Res., Sect. B 219/220, 763 (2004).
14. J. Creus, H. Mazille, and H. Idrissi: Porosity evaluation of protective coatings onto steel, through electrochemical techniques. Surf. Coat. Technol. 130, 224 (2000).
15. C. Liu, A. Leyland, Q. Bi, and A. Matthews: Corrosion resistance of multi-layered plasma-assisted physical vapour deposition TiN and CrN coatings. Surf Coat. Technol. 141, 164 (2001).
16. M. Fenker, M. Balzer, H.A. Jelin, H. Kappl, J.J. Lee, K-H. Lee, and H-S. Lee: Improvement of the corrosion resistance of hard wear resistant coatings by intermediate plasma etching or multilayered structure. Surf. Coat. Technol. 150, 101 (2002).
17. K.D. Bouzakis, S. Hadjiyiannis, G. Skordaris, I. Mirisidis, N. Michailidis, and G. Erkens: Wear development on cemented carbide inserts, coated with variable film thickness in the cutting wedge region. Surf. Coat. Technol. 188/189, 636 (2004).
18. A.D. Sarkar: Friction and Wear (Academic Press, New York, 1940), p. 3.
19. C.D. Wagner, W.M. Riggs, L.E. Davis, and J.F. Moulder: Handbook of X-ray Photoelectron Spectroscopy, (Perkin-Elmer, Pittsburgh, PA, 1979), p. 73.
20. PDF Card No. 06-0694, PCPDFWIN, Version 2.02, JCPDSICDD, 1999.
21. M. Murakami and R. Vook: Strain-relaxation mechanisms of thin deposited films. Crit. Rev. Solid State Mater. Sci. 11, 317 (1983).
22. K.L. Johnson: Contact Mechanics (Cambridge Press, Cambridge, UK, 1985), p. 153.
23. X. Pang, K. Gao, H. Yang, L. Qiao, Y. Wang, and A.A. Volinsky: Interfacial microstructure of chromium oxide coatings. Adv. Eng. Mater. 9, 594 (2007).
24. A. Leyland and A. Matthews: Thick Ti/TiN multilayered coatings for abrasive and erosive wear resistance. Surf Coat. Technol. 70, 19(1994).
25. G.S. Kim, S.Y. Lee, J.H. Hahn, B.Y. Lee, J.G. Han, J.H. Lee, and S.Y. Lee: Effects of the thickness of Ti buffer layer on the mechanical properties of TiN coatings. Surf. Coat. Technol. 171, 83 (2003).
26. X. Pang, K. Gao, and A.A. Volinsky: Annealing effects on microstructure and mechanical properties of chromium oxide coatings. Thin Solid Films doi: 10.1016/j.tsf.2007.08.083 (2007).
27. H. Choi, S. Choi, O. Anderson, and K. Bange: Influence of film density on residual stress and resistivity for Cu thin films deposited by bias sputtering. Thin Solid Films 358, 202 (1999).
28. G. Mohan Rao and S. Mohan: Studies on glow-discharge characteristics during dc reactive magnetron sputtering. J. Appl. Phys. 69, 6652 (1991).
29. A.A. Volinsky, N.R. Moody, and W.W. Gerberich: Interfacial toughness measurements for thin films on substrates. Acta Mater. 50, 441 (2002).
30. A.A. Volinsky, J.B. Vella, and W.W. Gerberich: Fracture toughness, adhesion and mechanical properties of low-K dielectric thin films measured by nanoindentation. Thin Solid Films 429, 201 (2002).
31. X.D. Li, D.F. Diao, and B. Bhushan: Fracture mechanisms of amorphous carbon films in nanoindentation. Acta Mater. 45, 4453 (1997).
32. B. Bhushan and X.D. Li: Nanomechanical characterization of solid surfaces and thin films. Int. Mater. Rev. 48, 125 (2003).