Temperature induced dissolution of Cr2O3 into polycrystalline tantalum

Thin Solid Films

Volumn 302, Issue 1-2, 1997, Pages 266-269

  Rothhaar, U ^a   Oechsner, H ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

Auger electron spectroscopy (AES); Depth profiling; Diffusion; Oxides

Indexed keywords

ACTIVATION ENERGY; AUGER ELECTRON SPECTROSCOPY; CHROMIUM COMPOUNDS; DIFFUSION IN SOLIDS; DISSOLUTION; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; REACTION KINETICS; SUBSTRATES; TANTALUM; THERMAL EFFECTS;

DEPTH PROFILING;

PROTECTIVE COATINGS;

EID: 0031165937     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09576-4     Document Type: Article

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