Optical designs of grazing incidence collector for extreme ultraviolet lithography

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 4, 2007, Pages

  Zocchi, Fabio E ^a   Benedetti, Enrico ^a  

^a Media Lario Technologies   (Italy)

Author keywords

Collection efficiency; Collector; Extreme ultraviolet lithography

Indexed keywords

BOUNDARY CONDITIONS; EXTREME ULTRAVIOLET LITHOGRAPHY; GRADIENT INDEX OPTICS; PROBLEM SOLVING;

COLLECTION EFFICIENCY; GRAZING INCIDENCE COLLECTORS; WOLTER CONFIGURATION;

OPTICAL DESIGN;

EID: 37549058788     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2811949     Document Type: Article

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