Effect of residual stress on the fracture strength of columnar TiN films

Journal of Materials Research

Volumn 22, Issue 12, 2007, Pages 3501-3506

  Suresha, S J ^a   Gunda, R ^a   Jayaram, V ^a   Biswas, S K ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; FRACTURE TOUGHNESS; HARDNESS; INDENTATION; METALLIC FILMS; PLASTICITY; RESIDUAL STRESSES;

INTERCOLUMNAR FRACTURE STRENGTH; LOAD-DISPLACEMENT CURVES;

TITANIUM NITRIDE;

EID: 37549058731     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0442     Document Type: Article

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