Micro-abrasive wear of DC and pulsed DC titanium nitride thin films with different levels of film residual stresses

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4242-4246

  Cozza, R C ^a   Tanaka, D K ^a   Souza, R M ^a  

^a Polytechnic School   (Brazil)

Author keywords

Plasma processing and deposition; Stress; Titanium nitride; Tribology

Indexed keywords

ABRASION; ADHESION; CARBIDES; COMPRESSIVE STRESS; RESIDUAL STRESSES; TITANIUM NITRIDE; TRIBOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE;

MICRO-ABRASIVE WEAR BEHAVIOR; PLASMA DEPOSITION; PLASMA PROCESSING;

THIN FILMS;

ABRASION; ADHESION; CARBIDES; COMPRESSIVE STRESS; RESIDUAL STRESSES; THIN FILMS; TITANIUM NITRIDE; TRIBOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE;

EID: 33751215861     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.044     Document Type: Article

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