Deformation mechanism and punch taper effects on nanoimprint process by molecular dynamics

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 11 A, 2004, Pages 7665-7669

  Hsu, Quang Cherng ^a   Wu, Chen Da ^a   Fang, Te Hua ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Atomic deformation; Molecular dynamics; Nanoimprint; Punch cone angle; Taper effect

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; ISOTHERMS; LITHOGRAPHY; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; POTENTIAL ENERGY; SINGLE CRYSTALS;

ATOMIC DEFORMATION; NANOIMPRINT; PUNCH CONE ANGLE; TAPER EFFECT;

NANOTECHNOLOGY;

ENERGY; ISOTHERMS; LITHOGRAPHY; MATHEMATICAL MODELS; PRINTING; SIMULATION; SINGLE CRYSTALS;

EID: 11144222542     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.7665     Document Type: Article

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