Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films

Surface and Coatings Technology

Volumn 202, Issue 9, 2008, Pages 1738-1745

  Kulikovsky, V ^a,b   Vorlicek V ^a   Bohac P ^a   Stranyanek M ^a,c   Ctvrtlik R ^a,c   Kurdyumov, A ^b   Jastrabik, L ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^c PALACKÝ UNIVERSITY   (Czech Republic)

Author keywords

Amorphous; Hardness; Nanocomposites; Nanocrystalline SiC films; Sputtering

Indexed keywords

AMORPHOUS FILMS; ELASTIC MODULI; HARDNESS; NANOCOMPOSITES; NANOCRYSTALLINE SILICON; SILICON CARBIDE;

INTRINSIC STRESS; NANOCRYSTALLINE FILM;

MAGNETRON SPUTTERING;

AMORPHOUS FILMS; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; NANOCOMPOSITES; NANOCRYSTALLINE SILICON; SILICON CARBIDE;

EID: 37349050347     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.07.029     Document Type: Article

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