Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2338-2343

  Williams, J S ^a   Chen, Y ^a   Wong Leung, J ^a   Kerr, A ^a   Swain, M V ^b  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; DISLOCATIONS (CRYSTALS); ION IMPLANTATION; LOADING; PHASE TRANSITIONS; PLASTICITY; POINT DEFECTS; SEMICONDUCTING SILICON; SEMICONDUCTOR MATERIALS;

SEMICONDUCTOR TO METAL TRANSFORMATION; ULTRAMICROINDENTATION;

MECHANICAL VARIABLES MEASUREMENT;

EID: 0032662725     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0310     Document Type: Article

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