Extreme ultraviolet lithography at IMEC: Shadowing compensation and flare mitigation strategy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2127-2131

  Lorusso, G F ^a   Goethals, A M ^a   Jonckheere, R ^a   Hermans, J ^a   Ronse, K ^a   Myers, A M ^b,g   Kim, I ^c,g   Niroomand, A ^d,g   Iwamoto, F ^e,g   Ritter, D ^f  

^a IMEC   (Belgium)

^b INTEL CORPORATION   (United States)

^c SAMSUNG Electronics   (South Korea)

^d MICRON TECHNOLOGY INC   (United States)

^e PANASONIC CORPORATION   (Japan)

^f Sigma C Software AG   (Germany)

^g IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

FLARE MITIGATION STRATEGY; MASK PROJECTS;

MICROELECTRONICS; PROBLEM SOLVING; PRODUCTION; PROJECT MANAGEMENT; TECHNOLOGY;

EXTREME ULTRAVIOLET LITHOGRAPHY;

EID: 37149034956     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2781516     Document Type: Article

References (14)

1. N. Harned, Proc. SPIE 3838, 651706 (2007).
2. A. M. Goethals, R. Jonckheere, G. F. Lorusso, J. Hermans, and F. Van Roey, Proc. SPIE 3838, 651709 (2007).
3. C. Krautschik, M. Ito, I. Nishiyama, and S. Okazaki, Proc. SPIE 4688, 289 (2002).
4. C. Krautschik, Proc. SPIE 5037, 58 (2003).
5. F. M. Schellenberg, J. Word, and O. Toublan, Proc. SPIE 5751, 320 (2005).
6. K. Otaki, Jpn. J. Appl. Phys., Part 1 39, 6819 (2000).
7. T. V. Pistor, A. R. Neureuther, and R. J. Socha, Proc. SPIE 4000, 228 (2000).
8. M. Sugawara, A. Chiba, and I. Nishiyama, J. Vac. Sci. Technol. B 21, 2701 (2003).
9. S. B. Bollepalli, M. Khan, and F. Cerrina, J. Vac. Sci. Technol. B 17, 2992 (1999).
10. U. Mickan and M. Lowisch, Proceedings of the EMLC, 2005 (unpublished).
11. M. Chandhok and M. Goldstein, U.S. Patent No. 7,022,443 (4 April 2006).
12. J. Rau, U.S. Patent No. 6,707,123 (16 March 2004).
13. S. Schwarzl, U.S. Patent No. 6,872,495 (29 March 2005).
14. M. Lowisch, M. M. T. M. Dierichs, K. Van Ingen Schenau, H. Van Der Laan, M. H. A. Leenders, E. McCoo, and U. Mickan, U.S. Patent No. 7,042,550 (9 May 2006).