13.5 nm EUV generation from tin-doped droplets using a fiber laser

Optics Express

Volumn 15, Issue 25, 2007, Pages 16348-16356

  George, Simi A ^a   Hou, Kai Chung ^b   Takenoshita, Kazutoshi ^a   Galvanauskas, Almantas ^b   Richardson, Martin C ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAM EFFECTS; LIGHT EMISSION; SPECTRUM ANALYSIS;

EUV GENERATION; IN-BAND CONVERSION EFFICIENCY;

FIBER LASERS;

EID: 37149019530     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.016348     Document Type: Article

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