Impact of glass temperature for thermal nanoimprint

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2392-2395

  Scheer, H C ^a   Bogdanski, N ^a   Wissen, M ^a   Mollenbeck S ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR WEIGHT; PARAMETER ESTIMATION; POLYMETHYL METHACRYLATES; POLYSTYRENES; SUPERCONDUCTING TRANSITION TEMPERATURE; VISCOSITY;

THERMAL NANOIMPRINT;

POLYVINYL CHLORIDES;

EID: 37149003099     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2811718     Document Type: Article

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