Defect behavior in aluminum interconnect lines deformed thermomechanically by cyclic joule heating

Acta Materialia

Volumn 56, Issue 2, 2008, Pages 274-281

  Geiss, Roy H ^a   Read, David T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Aluminum; Dislocations; Fatigue; TEM; Thin films

Indexed keywords

ALUMINUM; CRYSTAL DEFECTS; CRYSTALLOGRAPHY; JOULE HEATING; SCANNING ELECTRON MICROSCOPY; THERMOMECHANICAL TREATMENT; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM INTERCONNECT LINES; CRYSTALLOGRAPHIC DIRECTIONS; CYCLIC JOULE HEATING; PRISMATIC LOOPS;

ELECTRIC LINES;

EID: 37049023185     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2007.09.033     Document Type: Article

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