Simple post-processing technique to tune resonant frequency of film bulk acoustic resonators and stacked crystal filters

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1998, Pages 831-835

  Lakdawala, Hasnain ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL FILTERS; CRYSTAL RESONATORS; FABRICATION; MEMBRANES; NATURAL FREQUENCIES; REACTIVE ION ETCHING; SILICON NITRIDE; TUNING;

POST PROCESSING TUNING TECHNIQUE; STACKED CRYSTAL FILTERS; THIN FILM BULK ACOUSTIC RESONATORS;

PIEZOELECTRIC DEVICES;

EID: 0032307312     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)