Electrically tunable and switchable film bulk acousitc resonator

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 22-26

  Pang, Wei ^a   Zhang, Hao ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

Electrical tuning; FBAR; Mems actuator; Switchable resonator

Indexed keywords

ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; TUNING;

ELECTRICAL TUNING; FILM BULK ACOUSTIC RESONATOR (FBAR); MEMS ACTUATOR; SWITCHABLE RESONATOR;

ACOUSTIC RESONATORS;

EID: 28744436927     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. B.P. Otis, J.M. Rabaey, "A 300μW 1.9-GHz CMOS oscillator utilizing micromachined resonators," Solid-State Circuits, IEEE Journal of, vol.38, no. 7, pp.1271-1274, 2003
2. G.G. Fattinger, J. Kaitila, R. Aigner, W. Nessler, "Thin film bulk acoustic wave devices for applicnfions at 5.2 GHz," IEEE Ultrasonics Symposium, 2003, pp. 174-177.
3. R. Ruby, P. Merchant, "Micromachined Thin Film Bulk Acoustic Resoantors," 1994 IEEE International Frequency Control Symposium, pp. 135-138.
4. U.S Patent 5,446,306, R.B. Stokes et al., TRW Inc., "Thin film voltage-tuned semiconductor bulk acoustic resonator," Aug. 29, 1995