5GHz low-phase-noise oscillator based on FBAR with low TCF

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1100-1101

  Zhang, Hao ^a   Kim, Jongjin ^a   Pang, Wei ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; CMOS INTEGRATED CIRCUITS; FREQUENCIES; TEMPERATURE DISTRIBUTION;

FABRICATION PROCESS; FBAR; LC OSCILLATOR; PHASENOISE;

OSCILLATORS (ELECTRONIC);

EID: 27544438281     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. C.-M. Yang, K. Uehara, S.-K. Kim, S. Kameda, H. Nakase and K. Tsubouchi, "High C-Axis-Oriented AlN Film Using MOCVD for 5GHz-Band FBAR Filter," 2003 IEEE Ultrasonic Symposium, pp. 170-173.
2. G. G. Fattinger, J. Kaitila, R. Aigner, and W. Nessler, "Thin Film Bulk Acoustic Wave Devices for Applications at 5.2GHz," 2003 IEEE Ultrasonic Symposium, pp. 174-177.
3. E.-C. Park, S.-H. Baek, T.-S. Song, J.-B. Yoon, and E. Yoon, "Performance Comparison of 5GHz VCOs Integrated by CMOS Compatible High Q MEMS Inductors," 2003 IEEE MTT-S Digest, pp. 721-724.
4. 3 Thin Films," 2004 IEEE MTT-S Digest, pp. 1509-1512.