Origin of growth defects in CVD diamond epitaxial films

Diamond and Related Materials

Volumn 17, Issue 1, 2008, Pages 60-65

  Tallaire, A ^a   Kasu, M ^a   Ueda, K ^a   Makimoto, T ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

Defects; Etching; Homoepitaxy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; ETCHING; NUCLEATION; STACKING FAULTS; SURFACE DEFECTS;

FLAT TOP (FH); GROWTH CONDITIONS; GROWTH DEFECTS; HOMOEPITAXY; PYRAMIDAL HILLOCKS (PH);

EPITAXIAL FILMS;

EID: 36749088029     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.003     Document Type: Article

References (28)

1. Lee N., and Badzian A. Diam. Relat. Mater. 6 (1997) 130
2. Tsuno T., Imai T., and Fujimori N. Jpn. J. Appl. Phys. 33 (1994) 4039
3. Angus J.C., Sunkara M., Sahaida S.R., and Glass J.T. J. Mater. Res. 7 (1992) 3001
4. Sutcu L.F., Chu C.J., Thompson M.S., Hauge R.H., and Margrave J.L. J. Appl. Phys. 71 (1992) 5930
5. van Enckevort W.J.P., Janssen G., Vollenberg W., and Gilling L.J. J. Cryst. Growth 148 (1995) 365
6. Sawada H., Ichinose H., Watanabe H., Takeuchi D., and Okushi H. Diam. Relat. Mater. 10 (2001) 2030
7. Findeling-Dufour C., Vignes A., and Gicquel A. Diam. Relat. Mater. 4 (1995) 429
8. Kasu M., Kubovic M., Aleksov A., Teofilov N., Taniyasu Y., Sauer R., kohn E., Makimoto T., and Kobayashi N. Diam. Relat. Mater. 13 (2004) 226
9. Kokhryakov A.F., and Palyanov Y.N. J. Cryst. Growth 293 (2006) 469
10. Tallaire A., Achard J., Silva F., Sussmann R.S., Gicquel A., and Rzepka E. Phys. Stat. Sol. A 201 (2004) 2419
11. de Theije F.K., Van Veenendaal E., van Enckevort W.J.P., and Vlieg E. Surf. Sci. 492 (2001) 91
12. Theije F.K., Roy O., van der Laag N.J., and van Enckevort W.J.P. Diam. Relat. Mater. 9 (2000) 929
13. Kasu M., Ueda K., Ye H., Yamauchi Y., Sasaki S., and Makimoto T. Electron. Lett. 41 (2005) 22
14. Tavares C., Koizumi S., and Kanda H. Phys. Stat. Sol. A 202 (2005) 2129
15. Yamamoto M., Teraji T., and Ito T. J. Cryst. Growth 285 (2005) 130
16. Kasu M., Makimoto T., Ebert W., and Kohn E. Appl. Phys. Lett. 83 (2003) 3465
17. Yin L.W., Wang N.W., Zou Z.D., Li M.S., Sun D.S., Zheng P.Z., and Yao Z.Y. Appl. Phys. A 71 (2000) 473
18. Tarutani M., Takai Y., Shimizu R., Ando T., Kamo M., and Bando Y. Appl. Phys. Lett. 68 (1996) 2070
19. Hirth J.P., and Lothe J. Theory of Dislocations. second edition (1992), Krieger Publication
20. Pirouz P., Cockayne D.J.H., Sumida N., Hirsch P.B., and Lang A.R. Proc. R. Soc. A386 (1983) 241
21. Blumeneau A.T., Heggie M.I., Fall C.J., Jones R., and Frauenheim T. Phys. Rev. B 65 (2002) 205205
22. Blumenau A.T., Jones R., and Frauenheim T. J. Phys., Condens. Matter 15 (2003) S2951
23. Delclos S., Dorignac D., Phillipp F., Moulin S., and Bonnot A.M. Diam. Relat. Mater. 8 (1999) 682
24. Delclos S., Dorignac D., Philipp F., Silva F., and Gicquel A. Diam. Relat. Mater. 7 (1998) 222
25. Wild C., Kohl R., Herres N., Muller-Sebert W., and Koidl P. Diam. Relat. Mater. 3 (1994) 373
26. Tamor M.A., and Everson M.P. J. Mater. Res. 9 (1994) 1839
27. Everson M.P., Tamor M.A., Scholl D., Stoner B.R., Sahaida S.R., and Bade J.P. J. Appl. Phys. 75 (1994) 169
28. Van Enckevort W.J.P., Janssen G., Schermer J.J., and Giling L.J. Diam. Relat. Mater. 4 (1995) 250