A study on surface morphologies of (001) homoepitaxial diamond films

Diamond and Related Materials

Volumn 6, Issue 1, 1997, Pages 130-145

  Lee, Naesung ^a   Badzian, Andrzej ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Hillock growth; Homoepitaxial (001) diamond films; Misorientation angles; RHEED; Step growth

Indexed keywords

EID: 0040084573     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00698-x     Document Type: Article

References (68)

1. K.E. Spear, J. Am. Ceram. Soc., 72 (1989) 171.
2. N. Fujimori and A. Hara, in J.P. Dismukes, A.J. Purdes, B.S. Meyerson, T.D. Moustakas, K.E. Spear, K.V. Ravi and M. Yoder (eds.), Proceedings of the First International Symposium on Diamond and Diamond-like Films, The Electrochemical Society, Pennington, NJ, 1989, p. 14.
3. M.W. Geis, N.N. Efremow, J.D. Woodhouse, M.D. Aleese, M. Marchywka, D.G. Socker and J.F. Hochedez, IEEE Elec. Dev. Lett., 12 (1991) 456.
4. M. Seal, in A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa and M. Murakawa in A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa and M. Murakawa (eds.), Application of Diamond Films and Related Materials: Third International Conference, NIST Special Publication 885, Gaithersburg, MD, 1995, p. 3.
5. G.S. Gildenblat, S.A. Grot and A. Badzian, IEEE, 79 (1991) 647.
6. B.A. Fox, M.L. Hartsell, D.M. Malta, H.A. Wynands, C.-T. Kao, L.S. Plano, G.J. Tessmer, R.B. Henard, J.S. Holmes, A.J. Tessmer and D.L. Dreifus, Diamond Relat. Mater., 4 (1995) 622.
7. D.L. Dreifus, J.S. Holmes and B.R. Stoner, in A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa and M. Murakawa (eds.) Application of Diamond Films and Related Materials: Third International Conference, NIST Special Publication 885, Gaithersburg, MD, 1995, p. 71.
8. A. Badzian and T. Badzian, Diamond Relat. Mater., 2 (1993) 147.
9. G. Janssen, W.J.P. van Enckevort, W. Vollenberg and L.J. Giling, J. Cryst. Growth, 148 (1995) 355.
10. W.J.P. van Enckevort, G. Janssen, W. Vollenberg and L.J. Giling, J. Cryst. Growth, 148 (1995) 365.
11. J.-P. Vitton, J.-J. Garenne and S. Truchet, Diamond Relat. Mater., 2 (1993) 713.
12. H. Shiomi, K. Tanabe, Y. Nishibayashi and N. Fujimori, Jpn. J. Appl. Phys., 29 (1990) 34.
13. Y. Sato, I. Yashima, H. Fujita, T. Ando and M. Kamo, in R. Messier, J.T. Glass, J.E. Butler and R. Roy (eds.), Proceedings of the Second International Conference on New Diamond Science and Technology, Materials Research Society, Pittsburgh, PA, 1991, p. 371.
14. Y. Avigal, C. Uzan-Saguy, R. Kalish and Y. Lereah, Diamond Relat. Mater., 2 (1993) 462.
15. T.H. Borst, P.C. Münzinger and O. Weis, Diamond Relat. Mater., 3 (1994) 515.
16. R. Samlenski, J. Schmälzlin, R. Brenn, C. Wild, W. Müller-Sebert and P. Koidl, Diamond Relat. Mater., 4 (1995) 503.
17. J.J. Schermer, W.J.P. van Enckevort and L.J. Giling, Diamond Relat. Mater., 3 (1994) 408.
18. W.J.P. van Enckevort, G. Janssen, J.J. Schermer and L.J. Giling, Diamond Relat. Mater., 4 (1995) 250.
19. N. Lee and A. Badzian, Appl. Phys. Lett., 66 (1995) 2203.
20. N. Lee and A. Badzian, Appl. Phys. Lett., 67 (1995) 2011.
21. S. Hayashi, S. Yamanaka, H. Okushi and K. Kajimura, Appl. Phys. Lett., (in press).
22. M.P. Everson and M.A. Tamor, J. Mater. Res., 7 (1992) 1438.
23. T. Tsuno, T. Imai, Y. Nishibayashi, K. Hamada and N. Fujimori, Jpn. J. Appl. Phys., 30 (1991) 1063.
24. H. Kawarada, M. Aoki, H. Sasaki and K. Tsugawa, Diamond Relat. Mater., 3 (1994) 961.
25. Y. Kuang, N. Lee, A Badzian, T.T. Tsong, T. Badzian and C. Chen, Diamond Relat. Mater., 4 (1995) 1371.
26. Y. Kuang, Wang, N. Lee, A. Badzian, T. Badzian and T.T. Tsong, Appl. Phys. Lett., 67 (1995) 3721.
27. N. Lee, Microwave plasma-assisted chemical vapor deposition and characterization of (001) homoepitaxial diamond films, Ph.D. Thesis, The Pennsylvania State University, University Park, PA, 1996.
28. M. Mitsuhashi, S. Karasawa, S. Ohya and F. Togashi, Appl. Surf. Sci., 60/61 (1992) 565.
29. H.G. Maguire, M. Kamo, H.P. Lang and H.-J. Guntherodt, Appl. Surf. Sci., 60/61 (1992) 301.
30. L.F. Sutcu, C.J. Chu, M.S. Thompson, R.H. Hauge, J.L. Margrave and M.P. D'Evelyn, J. Appl. Phys., 71 (1992) 5930.
31. W.J.P. van Enckevort, G. Janssen, W. Vollenberg, J.J. Schermer and L.J. Giling, Diamond Relat. Mater., 2 (1993) 997.
32. Th. Frauenheim, U. Stephan, P. Blaudeck, D. Porezag, H.-G. Busmann and W. Zimmermann-Edling, Diamond Relat. Mater., 3 (1994) 966.
33. M.A. Tamor and M.P. Everson, J. Mater. Res., 8 (1993) 1770.
34. J.E. Mahan, K.M. Geib, G.Y. Robinson and R.G. Long, J. Vac. Sci. Technol. A, 8 (1990) 3692.
35. H. Sasaki, M. Aoki and H. Kawarada, Diamond Relat. Mater., 2 (1993) 1271.
36. P.G. Lurie and J.M. Wilson, Surf. Sci., 65 (1977) 453.
37. A.V. Hamza, G.D. Kubiak and R.H. Stulen, Surf. Sci., 237 (1990) 35.
38. R.E. Thomas, R.A. Rudder and R.J. Markunas, J. Vac. Sci. Technol. A, 10 (1992) 2451.
39. T. Tsuno, T. Tomikawa, S. Shikata, T. Imai and N. Fujimori, Appl. Phys. Lett., 64 (1994) 572.
40. D.S. Knight and W.B. White, J. Mater. Res., 4 (1989) 385.
41. J.P. van der Eerden and H. Müller-Krumbhaar, Electrochim. Acta, 31 (1986) 1007.
42. M. Henzler, Surf. Sci., 298 (1993) 369.
43. M. Henzler, Prog. Surf. Sci., 42 (1993) 297.
44. L.J. Clarke, Surface Crystallography, An Introduction to Low Energy Electron Diffraction, John Wiley and Sons, New York, 1985, p. 209.
45. G. Ertl and J. Küppers, Low Energy Electrons and Surface Chemistry, 2nd Edn., VCH, Weinheim, Germany, 1985, p. 201
46. H.-N. Yang, G.-C. Wang and T.-M. Lu, Diffraction from Rough Surfaces and Dynamic Growth Fronts, World Scientific Publishing Co., Singapore, 1993.
47. N. Lee and A. Badzian, Phys. Rev. B, 53 (1996) R1744.
48. B.J. Garrison, E.J. Dawnkaski, D. Srivastava and D.W. Brenner, Science, 255 (1992) 835.
49. S.J. Harris and D.G. Goodwin, J. Phys. Chem., 97 (1993) 23.
50. M. Zhu, R.H. Hauge, J.L. Margrave and M.P. D'Evelyn, in J.P. Dismukes and K.V. Ravi (eds.) Proceedings of the Third International Symposium on Diamond Materials, The Electrochemical Society, Pennington, NJ, 1993, p. 138.
51. M. Tsuda, S. Oikawa, S. Furukawa, C. Sekine and M. Hata, J. Electrochern. Soc., 139 (1992) 1482.
52. S.P. Mehandru and A.B. Anderson, Surf. Sci., 248 (1991) 369.
53. S. Skokov, B. Weiner and M. Frenklach, J. Phys. Chem., 98 (1994) 7073.
54. M. Frenklach, S. Skokov and B. Weiner, in K.V. Ravi and J.P. Dismukes (eds.) Proceedings of the Fourth International Symposium on Diamond Materials, The Electrochemical Society, Pennington, NJ, 1995, p. 1.
55. A. Gali, A. Mészáros and P. Deák, Diamond Relat. Mater., 5 (1996) 613.
56. A.A. Chernov, J. Cryst. Growth, 42 (1977) 55.
57. T. Nishinaga, in D.T.J. Hurle (ed.), Handbook of Crystal Growth, Vol. 3, Part B, Elsevier, Amsterdam, The Netherlands, 1994, p. 667.
58. B.A. Joyce, Rept. Progr. Phys., 37 (1974) 363.
59. H. aharoni, Vacuum, 26 (1976) 149.
60. K. Shibahara, N. Kuroda, S. Nishino and H. Matsunami, Jpn. J. Appl. Phys., 26 (1987) L1815.
61. H.S. Kong, J.T. Glass and R.F. Davis, J. Appl. Phys., 64 (1988) 2672.
62. L. Hollan and C. Schiller, J. Cryst. Growth, 22 (1974) 175.
63. R.J. Hamers, U.K. Köhler and J.E. Demuth, Ultramicroscopy, 31 (1989) 10.
64. R.J. Hamers, U.K. Köhler and J.E. Demuth, J. Vac. Sci. Technol. A, 8 (1990) 195.
65. A.J. Hoeven, D. Dijkkamp, E.J. van Loenen, J.M. Lenssinck and J. Dieleman, J. Vac. Sci. Technol. A, 8 (1990) 207.
66. A.J. Hoeven, J.M. Lenssinck, D. Dijkkamp, E.J. van Loenen and J. Dieleman, Phys. Rev. Lett., 63 (1989) 1830.
67. A.J. Hoeven, E.J. van Loenen, D. Dijkkamp, J.M. Lenssinck and J. Dieleman, Thin Solid Films, 183 (1989) 263.
68. A.J. Hoeven, D. Dijkkamp, J.M. Lenssinck and E.J. van Loenen, J. Vac. Sci. Technol. A, 8 (1990) 3657.