Effects of RIE treatments for {111} diamond substrates on the growth of P-doped diamond thin films

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 11, 2005, Pages 2129-2133

  Tavares, Céline ^a,b   Koizumi, Satoshi ^a   Kanda, Hisao ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND SUBSTRATES; HALL MOBILITY; PHOSPHORUS-DOPED FILMS; RIE TREATMENT;

CATHODOLUMINESCENCE; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; LIGHT EMISSION; MICROWAVES; PLASMA THEORY; REACTIVE ION ETCHING; THIN FILMS;

DIAMOND FILMS;

EID: 33746415279     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200561933     Document Type: Conference Paper

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