Mechanical properties of polymer nanostructures: Measurements based on deformation in response to capillary forces

Applied Physics A: Materials Science and Processing

Volumn 90, Issue 2, 2008, Pages 277-283

  Stoykovich, M P ^a   Yoshimoto, K ^a,b   Nealey, P F ^a  

^a University of Wisconsin Madison   (United States)

^b SCRIPPS RESEARCH INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LAPLACE EQUATION; LITHOGRAPHY; MECHANICAL PROPERTIES; POLYMETHYL METHACRYLATES;

BENDING BEAM MECHANICS; CAPILLARY FORCES; NANOSCALE POLYMER BEAMS;

NANOSTRUCTURES;

EID: 36749086919     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-007-4262-8     Document Type: Article

References (59)

1. International Technology Roadmap for Semiconductors (ITRS) 2005 Ed. (Semicon. Indus. Ass., San Jose, CA 2005)
2. J.N. Helbert, T. Dack, Handbook of VLSI Microlithography, 2nd Ed. (Noyes/William Andrews, LLC, Norwich, NY 2001)
3. D. Bellet, L. Canham, Adv. Mater. 10, 487 (1998)
4. T. Tanaka, M. Morigami, N. Atoda, J. Electrochem. Soc. 140, L115 (1993)
5. T. Tanaka, M. Morigami, N. Atoda, Japan. J. Appl. Phys. 32, 6059 (1993)
6. H.B. Cao, P.F. Nealey, W.D. Domke, J. Vac. Sci. Technol. B 18, 3303 (2000)
7. M.P. Stoykovich, H.B. Cao, K. Yoshimoto, L.E. Ocola, P.F. Nealey, Adv. Mater. 15, 1180 (2003)
8. K. Yoshimoto, M.P. Stoykovich, H.B. Cao, J.J. de Pablo, P.F. Nealey, W.J. Drugan, J. Appl. Phys. 96, 1857 (2004)
9. H. Namatsu, K. Kurihara, M. Nagase, K. Iwadate, K. Murase, Appl. Phys. Lett. 66, 2655 (1995)
10. J. Malzbender, J.M.J. den Toonder, A.R. Balkenende, G. de With, Mater. Sci. Eng. R 36, 47 (2002)
11. G.M. Pharr, W.C. Oliver, MRS Bull. 7, 28 (1992)
12. J.M.G. Cowie, Polymers: Chemistry and Physics of Modern Materials, 2nd edn. (Chapman and Hall, Great Britain, 1991)
13. J.L. Keddie, R.A.L. Jones, R.A. Cory, Europhys. Lett. 27, 59 (1994)
14. J.L. Keddie, R.A.L. Jones, R.A. Cory, Faraday Discuss. 98, 219 (1994)
15. W.E. Wallace, J.H. van Zanten, W.L. Wu, Phys. Rev. E 52, R3329 (1995)
16. J.A. Forrest, K. Dalnoki-Veress, J.R. Stevens, J.R. Dutcher, Phys. Rev. Lett. 77, 2002 (1996)
17. J.A. Forrest, K. Dalnoki-Veress, J.R. Dutcher, Phys. Rev. E 56, 5705 (1997)
18. J. Mattsson, J.A. Forrest, L. Böorjesson, Phys. Rev. E 62, 5187 (2000)
19. D.S. Fryer, P.F. Nealey, J.J. de Pablo, Macromolecules 33, 6439 (2000)
20. J.A. Torres, P.F. Nealey, J.J. de Pablo, Phys. Rev. Lett. 85, 3221 (2000)
21. D.S. Fryer, R.D. Peters, E.J. Kim, J.E. Tomaszewski, J.J. de Pablo, P.F. Nealey, C.C. White, W.L. Wu, Macromolecules 34, 5627 (2001)
22. R.S. Tate, D.S. Fryer, S. Pasqualini, M. Montague, J.J. de Pablo, P.F. Nealey, J. Chem. Phys. 115, 9982 (2001)
23. T.S. Jain, J.J. de Pablo, J. Chem. Phys. 120, 9371 (2004)
24. C.J. Ellison, J.M. Torkelson, Nature Mater. 2, 695 (2003)
25. C.W. Frank, V. Rao, M.M. Despotopoulou, R.F.W. Pease, W.D. Hinsberg, R.D. Miller, J.F. Rabolt, Science 273, 912 (1996)
26. D.B. Hall, J.M. Torkelson, Macromolecules 31, 8817 (1998)
27. B. Frank, A.P. Gast, T.P. Russell, H.R. Brown, C.J. Hawker, Macromolecules 29, 6531 (1996)
28. T.R. Böhme, J.J. de Pablo, J. Chem. Phys. 116, 9939 (2002)
29. K. van Workum, J.J. de Pablo, Nano Lett. 3, 1405 (2003)
30. K. Yoshimoto, T.S. Jain, P.F. Nealey, J.J. de Pablo, J. Chem. Phys. 122, 144712 (2005)
31. C.M. Stafford, B.D. Vogt, C. Harrison, D. Julthongpiput, R. Huang, Macromolecules 39, 5095 (2006)
32. B. Briscoe, L. Fiori, E. Pelillo, J. Phys. D 31, 2395 (1998)
33. M. Radmacher, R.W. Tillmann, M. Fritz, H.E. Gaub, Science 257, 1900 (1992)
34. C.G. Simon Jr., N. Eidelman, Y. Deng, N.R. Washburn, Macromol. Rapid Commun. 25, 2003 (2004)
35. C.A. Tweedie, D.G. Anderson, R. Langer, K.J. Van Vliet, Adv. Mater. 17, 2599 (2005)
36. A.G. Every, Meas. Sci. Technol. 13, R21 (2002)
37. J.A. Forrest, K. Dalnoki-Veress, J.R. Dutcher, Phys. Rev. E 58, 6109 (1998)
38. R. Hartschuh, Y. Ding, J.H. Roh, A. Kisliuk, A.P. Sokolov, C.L. Soles, R.L. Jones, T.J. Hu, W.L. Wu, A.P. Mahorowala, J. Polym. Sci. B Polym. Phys. 42, 1106 (2004)
39. W. Cheng, G. Fytas, A.V. Kiyanova, M.Y. Efremov, P.F. Nealey, Macromol. Rapid Commun. 27, 702 (2006)
40. R. Hotz, J.K. Krüger, W. Possart, R. Tadros-Morgane, J. Phys.: Condens. Matter 13, 7953 (2001)
41. C.M. Stafford, C. Harrison, K.L. Beers, A. Karim, E.J. Amis, M.R. Vanlandingham, H.-C. Kim, W. Volksen, R.D. Miller, E.E. Simonyi, Nat. Mater. 3, 545 (2004)
42. C.M. Stafford, S. Guo, C. Harrison, M.Y.M. Chang, Rev. Sci. Instrum. 76, 062207 (2005)
43. H.D. Espinosa, B.C. Prorok, M. Fischer, J. Mech. Phys. Solids 51, 47 (2003)
44. J.-H. Zhao, M. Kiene, C. Hu, P.S. Ho, Appl. Phys. Lett. 77, 2843 (2000)
45. J.-H. Zhao, T. Ryan, P.S. Ho, A.J. McKerrow, W.-Y. Shih, J. Appl. Phys. 88, 3029 (2000)
46. i = 4 MPa, and E = 5 GPa similar to the experimental PMMA beams.
47. W.M. Cheng, G.A. Miller, J.A. Manson, R.W. Hertzberg, L.H. Sperling, J. Mater. Sci. 25, 1917 (1990)
48. J.A. Johnson, D.W. Jones, J. Mater. Sci. 29, 870 (1994)
49. S.I. Naqui, I.M. Robinson, J. Mater. Sci. 28, 1421 (1993)
50. M.E. James, Polymer Data Handbook (Oxford, New York, 1999)
51. R.S. Lakes, Viscoelastic Solids (CRC, Boca Raton, FL, 1999)
52. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995)
53. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Science 272, 85 (1996)
54. C.J. Ellison, R.L. Ruszkowski, N.J. Fredin, J.M. Torkelson, Phys. Rev. Lett. 92, 095702 (2004)
55. W.C. Hu, K. Sarveswaran, M. Lieberman, G.H. Bernstein, J. Vac. Sci. Technol. B 22, 1711 (2004)
56. B.D. Gates, Q.B. Xu, M. Stewart, D. Ryan, C.G. Willson, G.M. Whitesides, Chem. Rev. 105, 1171 (2005)
57. L.E. Ocola, D. Tennant, G. Timp, A. Novembre, J. Vac. Sci. Technol. B 17, 3164 (1999)
58. F.J. Pantenburg, S. Achenbach, J. Mohr, J. Vac. Sci. Technol. B 16, 3547 (1998)
59. M.J. Rooks, E. Kratschmer, R. Viswanathan, J. Katine, R.E. Fontana, S.A. MacDonald, J. Vac. Sci. Technol. B 20, 2937 (2002)