Structure in thin and ultrathin spin-cast polymer films

Science

Volumn 273, Issue 5277, 1996, Pages 912-915

  Frank, C W ^a,c   Rao, V ^a,d   Despotopoulou, M M ^a   Pease, R F W ^a   Hinsberg, W D ^b   Miller, R D ^b   Rabolt, J F ^b,e  

^a Stanford University   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c INTEL CORPORATION   (United States)

^d Organic Chemicals   (United States)

^e UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; CRYSTALLIZATION; GLASS TRANSITION; HYDROGEN BONDS; MOLECULAR STRUCTURE; MORPHOLOGY; TEMPERATURE; THERMODYNAMIC PROPERTIES; THIN FILMS; ULTRATHIN FILMS;

AMORPHOUS POLYMETHYL HYDROXY STYRENE; POLYMER THIN FILMS; SEMICRYSTALLINE POLY DI HEXYL SILANE; SPIN CASTING; ULTRATHIN POLYMER FILMS;

POLYMERS;

GLASS; POLYMER; POLYSTYRENE; SILANE DERIVATIVE; SOLVENT;

ANISOTROPY; ARTICLE; CHEMICAL STRUCTURE; CRYSTALLIZATION; FILM; GEOMETRY; HYDROGEN BOND; PHASE TRANSITION; PRIORITY JOURNAL; TEMPERATURE; THICKNESS;

EID: 9444221479     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.273.5277.912     Document Type: Article

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47. Supported in part by the Polymers Program of ONR. the Sematech Center of Excellence on Lithography and Pattern Transfer, and the NSF-MRSEC Center on Polymer Interfaces and Macromolecular Assemblies (CPIMA).