Microcrystalline silicon for solar cells at high deposition rates by hot wire CVD

Materials Research Society Symposium - Proceedings

Volumn 715, Issue , 2002, Pages 623-629

  Schropp, R E I ^a   Xu, Y ^c   Iwaniczko, E ^c   Zaharias, G A ^b   Mahan, A H ^c  

^a UTRECHT UNIVERSITY   (Netherlands)

^b Stanford University   (United States)

^c NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OXIDATION; PHASE TRANSITIONS; POROSITY; QUANTUM EFFICIENCY; THERMAL EFFECTS; THIN FILMS; VOLUME FRACTION;

AMORPHOUS TRANSITION; DEPOSITION RATES; HOT WIRE CHEMICAL VAPOR DEPOSITION; MICROCRYSTALLINE SILICON; PHOTORESPONSE; QUALITY FILMS; STRETCHING BONDS;

SILICON SOLAR CELLS;

EID: 0036929298     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-715-a26.3     Document Type: Conference Paper

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