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Advanced Materials

Volumn 19, Issue 22, 2007, Pages 3912-3918

Microfabrication of a diffractive microlens array on n-GaAs by an efficient electrochemical method

(7) Zhang, Li a Ma, Xin Z a Zhuang, Jin L a Qiu, Chuan K c Du, Chun L c Tang, Jing a Tian, Zhao W a,b

a XIAMEN UNIVERSITY (China)

b XIAMEN UNIVERSITY (China)

c INSTITUTE OF OPTICS AND ELECTRONICS (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLABILITY; ELECTROCHEMISTRY; MICROARRAYS; MICROFABRICATION; MICROMACHINING; POLYMETHYL METHACRYLATES; SEMICONDUCTING GALLIUM ARSENIDE;

CONFINED ETCHANT LAYERS; ELECTROCHEMICAL METHODS; MICROLENS ARRAYS;

MICROLENSES;

EID: 36549006927 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/adma.200700300 Document Type: Article

Times cited : (51)

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