Applications of laser lithography on oxide film to titanium micromachining

Applied Surface Science

Volumn 208-209, Issue 1, 2003, Pages 165-170

  Chauvy, P F ^a   Hoffmann, P ^a   Landolt, D ^a  

^a EPFL   (Switzerland)

Author keywords

3D; Etching; Laser; Lithography; Micromachining; Titanium

Indexed keywords

ETCHING; LASER APPLICATIONS; LASER BEAM EFFECTS; LITHOGRAPHY; SURFACE STRUCTURE; TITANIUM; ULTRASONIC CLEANING; ANODIC OXIDATION; EXCIMER LASERS; HEAT AFFECTED ZONE; MICROMACHINING; PHOTOLITHOGRAPHY; SURFACE TOPOGRAPHY;

SURFACE SMOOTHNESS; LASER LITHOGRAPHY;

MICROMACHINING; TITANIUM COMPOUNDS;

EID: 0037443202     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01361-2     Document Type: Conference Paper

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