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Volumn 43, Issue 12-13, 1998, Pages 1683-1690

Studies on silicon etching using the confined etchant layer technique

Author keywords

Confined etchant layer technique (CELT); Etching; High resolution; Scanning electrochemical microscopy (SECM); Silicon

Indexed keywords

BROMINE; ELECTROCHEMICAL ELECTRODES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SOLUTIONS; SURFACE PHENOMENA;

CONFINED ETCHANT LAYER TECHNIQUE; ELECTROGENERATED BROMINE; SCANNING ELECTROCHEMICAL MICROSCOPY;

ETCHING;

EID: 0032310703 PISSN: 00134686 EISSN: None Source Type: Journal
DOI: 10.1016/S0013-4686(97)00301-0 Document Type: Article

Times cited : (50)

References (15)

1
- 0025954563
- A. J. Bard, F-R. F. Fan, D. T. Pierce, P. R. Unwin, D. O. Wipf and F. Zhou, Science 254, 68 (1992).
- (1992) Science , vol.254 , pp. 68
- Bard, A.J.¹ Fan, F.-R.F.² Pierce, D.T.³ Unwin, P.R.⁴ Wipf, D.O.⁵ Zhou, F.⁶

2
- 0001209094
- A. J. Bard, G. Denuault, C. Lee, D. Mandler and D. O. Wipf, Acc. Chem. Res. 23, 357 (1990).
- (1990) Acc. Chem. Res. , vol.23 , pp. 357
- Bard, A.J.¹ Denuault, G.² Lee, C.³ Mandler, D.⁴ Wipf, D.O.⁵

3
- 0024751814
- D. Mandler and A. J. Bard, J. Electrochem. Soc. 136, 3143 (1989).
- (1989) J. Electrochem. Soc. , vol.136 , pp. 3143
- Mandler, D.¹ Bard, A.J.²

4
- 0025470215
- D. Mandler and A. J. Bard, J. Electrochem. Soc. 137, 2468 (1990).
- (1990) J. Electrochem. Soc. , vol.137 , pp. 2468
- Mandler, D.¹ Bard, A.J.²

5
- 0004599340
- D. Mandler and A. J. Bard, Langmuir 6, 1489 (1990).
- (1990) Langmuir , vol.6 , pp. 1489
- Mandler, D.¹ Bard, A.J.²

6
- 24844454458
- A. J. Bard, F. Fan, J. Kwak and O. Lev, Anal. Chem. 61, 132 (1989).
- (1989) Anal. Chem. , vol.61 , pp. 132
- Bard, A.J.¹ Fan, F.² Kwak, J.³ Lev, O.⁴

7
- 0000877814
- J. Kwak and A. J. Bard, Anal. Chem. 61, 1221 (1989).
- (1989) Anal. Chem. , vol.61 , pp. 1221
- Kwak, J.¹ Bard, A.J.²

8
- 0030374130
- K. Borgwarth, C. Ricken, D. G. Ebling and J. Heinze, Fresenius J. Anal. Chem. 356, 288 (1996).
- (1996) Fresenius J. Anal. Chem. , vol.356 , pp. 288
- Borgwarth, K.¹ Ricken, C.² Ebling, D.G.³ Heinze, J.⁴

9
- 37049089120
- S. Meltzer and D. Mandler, J. Chem. Soc. Faraday Trans. 91, 1019 (1952).
- (1952) J. Chem. Soc. Faraday Trans. , vol.91 , pp. 1019
- Meltzer, S.¹ Mandler, D.²

10
- 24944542997
- Z. W. Tian, Z. Fen, Z. Q. Tian, X. Zhuo, J. Mu, C. Li, H. Lin, B. Ran, Z. X. Xie and W. Hu, Faraday Discuss. 94, 37 (1992).
- (1992) Faraday Discuss. , vol.94 , pp. 37
- Tian, Z.W.¹ Fen, Z.² Tian, Z.Q.³ Zhuo, X.⁴ Mu, J.⁵ Li, C.⁶ Lin, H.⁷ Ran, B.⁸ Xie, Z.X.⁹ Hu, W.¹⁰

11
- 0004082931
- (Edited by Z. W. Tian and Y. Cao) International Academic Publishers
- Z. W. Tian, Proceedings of the Ninth International Conference on Photochemical Conversion and Storage of Solar Energy, (Edited by Z. W. Tian and Y. Cao) p. 2490, International Academic Publishers (1993).
- (1993) Proceedings of the Ninth International Conference on Photochemical Conversion and Storage of Solar Energy , pp. 2490
- Tian, Z.W.¹

12
- 0004106098
- Z. W. Tian, Z. Q. Tian, Z. H. Lin and Z. X. Xie, Chin. J. Sci. Instr. 17, 14 (1996).
- (1996) Chin. J. Sci. Instr. , vol.17 , pp. 14
- Tian, Z.W.¹ Tian, Z.Q.² Lin, Z.H.³ Xie, Z.X.⁴

13
- 0042274702
- L. Xie, L. Y. Su, S. F. Yang, J. Luo, Z. H. Lin and Z. W. Tian, ISE Extended Abstracts, 46th Annual Meeting, Xiamen, 7-98 (1995).
- (1995) ISE Extended Abstracts, 46th Annual Meeting, Xiamen , pp. 7-98
- Xie, L.¹ Su, L.Y.² Yang, S.F.³ Luo, J.⁴ Lin, Z.H.⁵ Tian, Z.W.⁶

14
- 0042274701
- J. Luo, L. Y. Su, J. T. Wu, Z. H. Lin and Z. W. Tian, Electrochemistry 1, 270 (1995).
- (1995) Electrochemistry , vol.1 , pp. 270
- Luo, J.¹ Su, L.Y.² Wu, J.T.³ Lin, Z.H.⁴ Tian, Z.W.⁵

15
- 0004280988
- Butterworths, London
- R. Parsons, Handbook of Electrochemistry Constants, Butterworths, London (1959).
- (1959) Handbook of Electrochemistry Constants
- Parsons, R.¹

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