Surface texture evolution of polycrystalline and nanostructured films: RHEED surface pole figure analysis

Journal of Physics D: Applied Physics

Volumn 40, Issue 23, 2007, Pages

  Tang, F ^a   Parker, T ^a   Wang, G C ^a   Lu, T M ^a  

^a Research Rensselaer Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; HIGH ENERGY ELECTRON DIFFRACTION; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; TEXTURES;

NANOBLADES; OBLIQUE ANGLE VAPOUR DEPOSITION; POLYCRYSTALLINE FILMS;

THIN FILMS;

EID: 36348997052     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/23/R01     Document Type: Article

References (41)

1. For a review, see Huang H 2005 Texture evolution during thin film deposition Handbook of Multiscale Materials Modeling ed S Yip (Berlin: Springer) p 1039
2. Thompson C V 2000 Annu. Rev. Mater. Sci. 30 159
3. Paritosh, Srolovitz D J, Battaile C C, Li X and Butler J E 1999 Acta. Mater. 47 2269
4. Karpenko O P, Bilello J C and Yalisove S M 1997 J. Appl. Phys. 82 1397
5. van der Drift A 1967 Philips Res. Rep. 22 267
6. Bauer E 1964 Growth of oriented films on amorphous surfaces Single-Crystal Films (Proc. Int. Conf.) ed M H Francombe and H Sato (Oxford: Pergamon) p 43
7. See for example Cullity B D 1978 Elements of X-ray Diffraction (Reading, MA: Addison-Welsley) p 297
8. See for example Ichimiya A and Cohen P I 2005 Reflection High Energy Electron Diffraction (Cambridge: Cambridge University Press)
9. Braun W 1999 Applied RHEED (Berlin: Springer)
10. Harris J I, Joyce B A and Dobson P J 1981 Surf. Sci. 103 L90
11. Andrieu S and Fréchard P 1996 Surf. Sci. 360 289
12. Litvinov D, O'Donnell T and Clarke R 1999 J. Appl. Phys. 85 2151
13. Brewer R T, Hartman J W and Atwater H A 2000 Mater. Res. Soc. Symp. Proc. 585 75
14. Brewer R T, Arendt P N, Groves J R and Atwater H A 2001 Proc. SPIE 4468 124
15. Brewer R T, Groves J R, Arendt P N, Yashar P C and Atwater H A 2001 Appl. Surf. Sci. 175-176 691
16. Jason T Drotar, Lu T-M and Wang G-C 2004 J. Appl. Phys. 96 7071
17. Tang F, Gaire C, Ye D-X, Karabacak T, Lu T-M and Wang G-C 2005 Phys. Rev. B 72 035430
18. Tang F, Karabacak T, Morrow P, Gaire C, Wang G-C and Lu T-M 2005 Phys. Rev. B 72 165402
19. Brewer R T, Atwater H A, Groves J R and Arendt P N 2003 J. Appl. Phys. 93 205
20. Tang F, Wang G-C and Lu T-M 2006 Appl. Phys. Lett. 89 241903
21. Tang F, Wang G-C and Lu T-M 2007 J. Appl. Phys. 102 014306
22. Braun W 1999 Applied RHEED (New York: Springer)
23. Lagally M G, Savage D E and Tringides M C 1988 Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces (NATO ASI Series B: Physics vol 188) ed P K Larson and P J Dobson (New York: Plenum)
24. Tang F 2006 Study of texture evolution under oblique angle deposition by reflection high energy electron diffraction PhD Thesis Rensselaer Polytechnic Institute
25. Helming K and Preckwinkel U 2005 Solid State Phenom. 105 71
26. Lee S L, Windover D, Doxbeck M, Nielsen M, Kumar A and Lu T-M 2000 Thin Solid Films 377 447
27. Bunge H J and Klein H 1996 Z. Metallk. 87 465
28. Rodriguez-Navarro A B 2007 J. Appl. Cryst. 40 631
29. Schäfer B and Schwarzer R A 1998 Mater. Sci. Forum 273-275 223
30. Robbie K and Brett M J 1997 J. Vac. Sci. Technol. A 15 1460
31. Abelmann L and Lodder C 1997 Thin Solid Films 305 1
32. Zhao Y-P, Ye D-X, Wang G-C and Lu T-M 2003 Proc. SPIE 5219 59
33. Dirks A G and Leamy H J 1997 Thin Solid Films 47 219
34. Tait R N, Smy T and Brett M J 1993 Thin Solid Films 226 196
35. Brewer R T and Atwater H A 2002 Appl. Phys. Lett. 80 3388
36. Xu Y, Lei C H, Ma B, Evans H, Efstathiadis H, Rane M, Massey M, Balachandran U and Bhattacharya R 2006 Supercond. Sci. Technol. 19 835
37. Chudzik M P, Koritala R E, Luo L P, Miller D J, Balachandran U and Kannewurf C R 2001 IEEE Trans. Appl. Supercond. 11 3469
38. Ghekiere P, Mahieu S, De Winter G, De Gryse R and Depla D 2005 Thin Solid Films 493 129
39. Teplin C W, Ginley D S and Branz H M 2006 J. Non-Cryst. Solids 352 984
40. Tang F, Parker T, Li H-F, Wang G-C and Lu T-M 2007 J. Nanosci. Nanotechnol. 7 3239
41. Ricote J and Chateigner D 2004 J. Appl. Cryst. 37 91