High pass filter with above IC integrated SrTiO3 high K MIM capacitors

Solid-State Electronics

Volumn 51, Issue 11-12, 2007, Pages 1624-1628

  Defaÿ, Emmanuel ^a   Wolozan, David ^a   Blanc, Jean Pierre ^b   Serret, Emmanuelle ^b   Garrec, Pierre ^a   Verrun, Sophie ^a   Pellissier, Denis ^b   Delpech, Philippe ^b   Guillan, Julie ^b   André, Bernard ^a   Ulmer, Laurent ^a   Aïd, Marc ^a   Ancey, Pascal ^b  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Above IC; CMOS integration; Ferroelectric; High K; MIM capacitors; Strontium titanate

Indexed keywords

BICMOS TECHNOLOGY; DIELECTRIC LOSSES; FABRICATION; FERROELECTRIC MATERIALS; INTEGRATED CIRCUITS; MIM DEVICES; STRONTIUM COMPOUNDS; TITANIUM OXIDES;

COUPLING CAPACITORS; STO CAPACITORS; STRONTIUM TITANATE; SURFACE CAPACITANCE;

HIGH PASS FILTERS;

EID: 36248963617     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.09.036     Document Type: Article

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