PMNT films for integrated capacitors

Solid-State Electronics

Volumn 47, Issue 10, 2003, Pages 1631-1635

  Fribourg Blanc, Eric ^a   Cattan, Eric ^a   Rèmiens, Denis ^a   Defaÿ, Emmanuel ^b  

^a UNIVERSITÉ DE VALENCIENNES   (France)

^b CEA LETI   (France)

Author keywords

Dielectric; Low temperature crystallization; PMN; Relaxor ferroelectric

Indexed keywords

ANNEALING; CAPACITORS; CRYSTALLIZATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; SOLID SOLUTIONS; SPUTTER DEPOSITION; THIN FILMS;

INTEGRATED CAPACITORS;

LEAD COMPOUNDS;

EID: 0042594444     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00173-4     Document Type: Conference Paper

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