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Volumn 80, Issue 1, 2006, Pages 115-124

Effect of STO seeding on PZT films crystallization

Author keywords

Crystallization; Grain size; PZT; Seeding layer

Indexed keywords

CRYSTALLIZATION TEMPERATURE; ORIENTATION; PZT; SEEDING LAYERS;

EID: 33745738850     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600656635     Document Type: Article
Times cited : (3)

References (14)
  • 2
    • 33745746917 scopus 로고    scopus 로고
    • Low Temperature Seeding Process for Ferroelectric Memory Device, US Patent No. 5.817.170
    • S.B. Desu and C. K. Kwok, Low Temperature Seeding Process for Ferroelectric Memory Device, US Patent No. 5.817.170.
    • Desu, S.B.1    Kwok, C.K.2
  • 3
    • 33745736846 scopus 로고    scopus 로고
    • Process for Forming Thin Films of Functional Ceramics, US Patent 6.190.728
    • H. Suzuki, T. Hirano, and T. Wada, Process for Forming Thin Films of Functional Ceramics, US Patent 6.190.728.
    • Suzuki, H.1    Hirano, T.2    Wada, T.3
  • 4
    • 33745745546 scopus 로고    scopus 로고
    • Modulated Structure of PZT/PT Ferroelectric Thin Films for Non Volatile Random Acces Memories, US Patent No 5.850.089
    • U. Varshney and A. Kingon, Modulated Structure of PZT/PT Ferroelectric Thin Films for Non Volatile Random Acces Memories, US Patent No 5.850.089.
    • Varshney, U.1    Kingon, A.2
  • 5
    • 33745760675 scopus 로고    scopus 로고
    • Method for Forming PZT Thin Films using Seed Layer, US Patent No 6.333.066
    • Dae-sig Kim, Method for Forming PZT Thin Films using Seed Layer, US Patent No 6.333.066.
    • Kim, D.-S.1
  • 6
    • 0029196704 scopus 로고
    • Effects of Ti buffer layer on PZT crystallization processes in sol-gel deposition technique
    • K. Aoki, Y. Numata, and A. Nishimura, "Effects of Ti Buffer Layer on PZT Crystallization Processes in Sol-Gel Deposition Technique," Jpn. J. Appl. Phys. 34, 192-195 (1995).
    • (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 192-195
    • Aoki, K.1    Numata, Y.2    Nishimura, A.3
  • 8
    • 0942291186 scopus 로고    scopus 로고
    • Mixed titania-lead oxide seed layers for PZT growth on Pt(111): A study on nucleation, texture and properties
    • S. Hiboux and P. Murait, "Mixed Titania-Lead Oxide Seed Layers for PZT Growth on Pt(111): A Study on Nucleation, Texture and Properties," J. Eur. Ceram. Soc. 24(6), 1593-1596 (2004).
    • (2004) J. Eur. Ceram. Soc. , vol.24 , Issue.6 , pp. 1593-1596
    • Hiboux, S.1    Murait, P.2
  • 10
    • 0011955809 scopus 로고    scopus 로고
    • Preparation and characterization of highly oriented PZT thin films with seeding Ti layer deposited at low temperature by facing target sputtering
    • X.-S. Li, T. Tanaka, and Y. Suzuki, "Preparation and Characterization of Highly Oriented PZT Thin Films with Seeding Ti Layer Deposited at Low Temperature by Facing Target Sputtering," Vacuum 59, 800-805 (2000).
    • (2000) Vacuum , vol.59 , pp. 800-805
    • Li, X.-S.1    Tanaka, T.2    Suzuki, Y.3
  • 12
    • 10644245236 scopus 로고    scopus 로고
    • Dielectric properties of lead zirconate titanate thin films seeded with barium strontium titanate nanoparticles
    • T. Tanase, Y. Kobayashi, T. Nabatame, et al., "Dielectric Properties of Lead Zirconate Titanate Thin Films Seeded with Barium Strontium Titanate Nanoparticles," Thin Solid Films 471, 71-75 (2005).
    • (2005) Thin Solid Films , vol.471 , pp. 71-75
    • Tanase, T.1    Kobayashi, Y.2    Nabatame, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.