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Volumn 87, Issue 35, 2007, Pages 5565-5579

Filling the voids in silicon single crystals by precipitation of Cu3Si

Author keywords

[No Author keywords available]

Indexed keywords

COPPER COMPOUNDS; FILLING; PRECIPITATION (CHEMICAL); SINGLE CRYSTALS; VOID FRACTION;

EID: 36248955011     PISSN: 14786435     EISSN: 14786443     Source Type: Journal    
DOI: 10.1080/14786430701675811     Document Type: Article
Times cited : (11)

References (34)
  • 26
    • 36248995877 scopus 로고    scopus 로고
    • C.C. Griffioen, J.H. Evans, P.C. de Jong et al., Nucl. Inst. and Methods B27 449 (1988).
    • C.C. Griffioen, J.H. Evans, P.C. de Jong et al., Nucl. Inst. and Methods B27 449 (1988).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.