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Volumn 87, Issue 35, 2007, Pages 5565-5579
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Filling the voids in silicon single crystals by precipitation of Cu3Si
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Author keywords
[No Author keywords available]
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Indexed keywords
COPPER COMPOUNDS;
FILLING;
PRECIPITATION (CHEMICAL);
SINGLE CRYSTALS;
VOID FRACTION;
AVOGADRO'S NUMBER;
DISLOCATION LOOPS;
PHYSICAL STANDARDS;
SILICON;
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EID: 36248955011
PISSN: 14786435
EISSN: 14786443
Source Type: Journal
DOI: 10.1080/14786430701675811 Document Type: Article |
Times cited : (11)
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References (34)
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