Selectivity of nanocavities and dislocations for gettering of Cu and Fe in silicon

Applied Physics Letters

Volumn 78, Issue 18, 2001, Pages 2682-2684

  Stritzker, B ^a   Petravic, M ^a   Wong Leung, J ^a   Williams, J S ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035971854     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1363689     Document Type: Article

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