Micro and nanotechnologies for the development of an integrated chromatographic system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6589, Issue , 2007, Pages

  Casals, O ^a   Romano Rodriguez A ^a   Illa, X ^a   Zamani, C ^a   Vila A ^a   Morante, J R ^a   Gracia I ^b   Ivanov, P ^b   Sabate N ^b   Fonseca, L ^b   Santander, J ^b   Figueras, E ^b   Cane C ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

DRIE; Gas chromatographic system; Gas sensors; Metal oxide; Microdropping; Microfabrication

Indexed keywords

CHEMICAL SENSORS; FISH; GAS CHROMATOGRAPHY; MICROFABRICATION; REACTIVE ION ETCHING; SILICON;

DEEP REACTIVE ION ETCHING (DRIE); GAS CONCENTRATIONS; MICRODEPOSITION; SILICON MICROCOLUMNS;

NANOTECHNOLOGY;

EID: 36248953188     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.721924     Document Type: Conference Paper

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