Effect of substrate orientation on film properties using AC reactive magnetron sputtering

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 755-761

  Pulugurtha, S R ^a   Bhat, D G ^a   Gordon, M H ^a   Shultz, J ^a  

^a 3202 Bell Engineering Center   (United States)

Author keywords

Chromium nitride; Microstructure; PVD; Substrate orientation; Surface roughness; XPS

Indexed keywords

CHROMIUM COMPOUNDS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; REACTIVE SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS;

CHROMIUM NITRIDE; COLUMNAR GROWTH; SUBSTRATE ORIENTATION;

INORGANIC COATINGS;

CHROMIUM COMPOUNDS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; INORGANIC COATINGS; MAGNETRON SPUTTERING; MORPHOLOGY; REACTIVE SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS;

EID: 36048980612     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.071     Document Type: Article

References (22)

1. Iwatsubo S., and Naoe M. IEEE Trans. Magn. 37 4 (2001) 2298
2. De Hosson J.T.M., and De Raedt H.A. Rev. Adv. Mater. Sci. 5 (2003) 403
3. Mirkarimi P.B., and Stearns D.G. Appl. Phys. Lett. 77 14 (2000) 2243
4. Pulugurtha S.R., and Bhat D.G. Surf. Coat. Technol. 201 (2006) 4411
5. Kaunasiri R.P.U., Bruinsma R., and Rudnick K. Phys. Rev. Lett. 62 (1989) 788
6. Chekour L., Nouveau C., Chala A., Labidi C., Rouag N., and Djouadi M.A. Surf. Coat. Technol. 200 (2005) 241
7. Barabasi A.L., and Stanley H.E. Fractal Concepts in Surface Growth (1995)
8. Nam K.H., Jung Y.M., and Han J.G. Surf. Coat. Technol. 142-144 (2001) 1012
9. Vaz F., Ferreira J., Ribeiro E., Rebouta L., Lanceros-Mendez S., Mendes J.A., Alves E., Goudeau Ph., Rivie`re J.P., Ribeiro F., Moutinho I., Pischow K., and de Rijk J. Surf. Coat. Technol. 191 (2005) 317
10. Anitha V.P., Major S., Chandrashekharam D., and Bhatnagar M. Surf. Coat. Technol. 79 (1996) 50
11. Thornton J.A. J. Vac. Sci. Technol. 11 4 (1974) 666
12. www.webelements.com/webelements/compounds
13. Morrow P., Tang F., Karabacak T., Wang P.I., Ye D.-X., Wang G.-C., and Lu T.-M. J. Vac. Sci. A 24 2 (2006) 235
14. Fornies E., Gallindo R.E., Sanchez O., and Albella J.M. Surf. Coat. Technol. 200 20-21 (2006) 6047
15. Pradhan S.K., Nouveau C., Vasin A., and Djouadi M.A. Surf. Coat. Technol. 200 (2005) 141
16. Pakala M., and Lin R.Y. Surf. Coat. Technol. 81 (1996) 233
17. D. Tonini, C. Greggio, G. Keppel, F. Laviano, M. Musiani, G. Torzo, V. Palmieri, Università degli Studi di Padova; INFN-LNL (Legnaro, PD); INFM Padua; Turin, Polytechnic; CNR-IENI, Padua. ITALY. (http://srf.desy.de/fap/paper/ThP11.pdf).
18. Lee N.-E., Cahill D.G., and Greene J.E. Phys. Rev., B, 53 12 (1996) 7876
19. Hwang K.-H., Yoona E., and Yong Lee K.-W.W.J. Appl. Phys. Lett. 67 24 (1995) 3590
20. Smith R.W., and Srolovitz D.J. J. Appl. Phys. 79 3 (1996) 1448
21. Stearns D.G. Appl. Phys. Lett. 62 (1993) 1745
22. Lippitz A., and Hubert Th. Surf. Coat. Technol. 200 (2005) 250