A study of AC reactive magnetron sputtering technique for the deposition of compositionally graded coating in the Cr-Al-N system

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4411-4418

  Pulugurtha, Syamala Rani ^a   Bhat, Deepak G ^a  

^a 3202 Bell Engineering Center   (United States)

Author keywords

CrAlN; CrN; Morphology; Oxidation; Phase analysis; Physical vapor deposition (PVD)

Indexed keywords

ALUMINUM; CHROMIUM; COATINGS; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; MORPHOLOGY; OXIDATION; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COMPOSITIONALLY GRADED COATING;

MAGNETRON SPUTTERING;

ALUMINUM; CHROMIUM; COATINGS; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; MORPHOLOGY; OXIDATION; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 33751210629     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.079     Document Type: Article

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