Response of inorganic materials to laser - Plasma EUV radiation focused with a lobster eye collector

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6586, Issue , 2007, Pages

  Bartnik, Andrzej ^a   Fiedorowicz, Henryk ^a   Jarocki, Roman ^a   Kostecki, Jerzy ^a   Szczurek, Mirosław ^a   Havlikova, Radka ^b   Pína, Ladislav ^b   Švéda, Libor ^b   Inneman, Adolf ^c  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

^b CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^c Reflex sro   (Czech Republic)

Author keywords

EUV; Gas puff target; Laser plasma; Luminescence; Scattering

Indexed keywords

BIOLOGICAL MATERIALS; DISCOLORATION; LASER RADIATION; LIGHT SCATTERING; LUMINESCENCE; RADIATION DAMAGE; STRUCTURE (COMPOSITION); THERMAL EFFECTS; WAVELENGTH;

ATOMIC SHELLS; GAS PUFF TARGET; INORGANIC MATERIALS; LASER PLASMAS;

PLASMAS;

EID: 36048956879     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.722749     Document Type: Conference Paper

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