Structure modifications in silicon irradiated by ultra-short pulses of XUV free electron laser

Journal of Alloys and Compounds

Volumn 382, Issue 1-2, 2004, Pages 264-270

  Pełka, Jerzy B ^a   Andrejczuk, Andrzej ^b   Reniewicz, Henryk ^b   Schell, Norbert ^c   Krzywiński, Jacek ^a,d   Sobierajski, Ryszard ^e   Wawro, Andrzej ^a   Zytkiewicz, Zbigniew R ^a   Klinger, Dorota ^a   Juha, Libor ^f  

^a INSTITUTE OF PHYSICS   (Poland)

^b UNIVERSITY OF BIALYSTOK   (Poland)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^d DESY   (Germany)

^e WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^f INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

Ablation; Laser processing; Material modification; Semiconductors; Silicon; XUV free electron laser

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON IRRADIATION; FREE ELECTRON LASERS; LASER ABLATION; LITHOGRAPHY; MORPHOLOGY; SEMICONDUCTOR MATERIALS; SILICON; STRUCTURAL ANALYSIS; X RAY DIFFRACTION;

FREE ELECTRON LASER RADIATION; LASER PROCESSING; MATERIAL MODIFICATION; XUV FREE ELECTRON LASER;

ULTRASHORT PULSES;

EID: 8444219759     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2004.05.051     Document Type: Conference Paper

References (17)

1. M. Cromacchia, H. Winnick (Eds.), Proceedings of the Workshop on Fourth Generation Light Sources, SSRL-92/02, 1992.
2. LCLS The First Experiments, October 2000 ( http://www-ssrl.slac.stanford. edu/LCLS/papers/LCLS_Experiments_2.pdf).
3. TESLA Technical Design Report Part V, The X-ray free electron laser, DESY 2001-011, ECFA 2001-209.
4. Cho A. Science. 296:2002;1008-1010.
5. Ameer-Beg S., Perrie W., Rathbone S., Wright J., Weaver W., Champoux H. Appl. Surf. Sci. 127-129:1998;875-880.
6. von der Linde D., Sokolowski-Tinten K. Appl. Surf. Sci. 154-155:2000;1-10.
7. H.O. Jeschke, M.E. Garcia, K.H. Bennemann, Phys. Rev. Lett. 87 (2001) 015003 (1-4).
8. Wellershoff S.-S., Hohlfeld J., Güdde J., Matthias E. Appl. Phys. A. 69(Suppl.):1999;S99-S107.
9. Ayvazyan V., et al. Eur. Phys. J. D 20:2002;49-156.
10. R. Sobierajski, J. Krzywinski, A. Andrejczuk, U. Hahn, M. Jurek, J.B. Pełka, H. Reniewicz, M. Sikora, W. Sobala, Experimental station to study interaction of intense femtosecond XUV pulses with matter at TESLA Test Facility Free Electron Laser, in press.
11. Ayvazyan V., et al. Phys. Rev. Lett. 88(10):2002;104802.
12. E.L. Saldin, E.A. Schneidmiller, M. Yurkov, The Physics of Free Electron Lasers, Springer, Berlin, Heidelberg, 2000.
13. Gerth Ch., Faatz B., Lokajczyk T., Treusch R., Feldhaus J. Nucl. Instr. Meth. Phys. Res. A. 475:2001;481-486.
14. Ayvazyan V., et al. Nucl. Instr. Meth. A. 507:2003;368-372.
15. Her T.-H., Finlay R.J., Wu C., Mazur E. Appl. Phys. A. 70:2000;383-385.
16. Furusawa K., Takahashi K., Kumagai H., Midorikawa K., Obara M. Appl. Phys. A. 69:1999;S359-S366.
17. Tien A.-C., Backus S., Kapteyn H., Murnane M., Mourou G. Phys. Rev. Lett. 82:1999;3883-3886.