Properties of (Ti,Al)N coatings deposited by the magnetic filter cathodic arc

Surface and Coatings Technology

Volumn 133-134, Issue , 2000, Pages 319-324

  Leu, Ming Sheng ^a   Chen, B F ^a   Chen, S Y ^a   Lee, Y W ^a   Lih, W C ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CATHODES; DEPOSITION; TITANIUM NITRIDE;

ALUMINUM NITRIDE; MAGNETIC FILTER CATHODIC ARC;

CERAMIC COATINGS;

CATHODIC ARC PLASMA DEPOSITION; COATING; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0034310623     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00949-X     Document Type: Article

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