Evaluation of Poisson's ratio and Young's modulus of nitride films by combining grazing incidence X-ray diffraction and laser curvature techniques

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 345-348

  Chen, Hong Ying ^a   Chen, Jui Hong ^b   Lu, Fu Hsing ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Elastic properties; Nitrides; Poisson's ratio; TiAlN; X ray diffraction; Young's modulus

Indexed keywords

ELASTIC MODULI; LASER RESONATORS; NITRIDES; PLASMA DEPOSITION; POISSON RATIO; X RAY DIFFRACTION;

LASER CURVATURE; TERNARY NITRIDE;

THIN FILMS;

EID: 36048945347     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.135     Document Type: Article

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