Single-crystal Ti2AlN thin films

Applied Physics Letters

Volumn 86, Issue 11, 2005, Pages 1-3

  Joelsson, J ^a   Hofling A ^a   Birch, J ^a   Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELASTIC MODULI; ELECTRIC CONDUCTIVITY; ELECTRIC DISCHARGES; HARDNESS; INDENTATION; THIN FILMS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; ULTRAHIGH VACUUM;

HEXAGONAL CRYSTAL STRUCTURE; MAGNETRON POWER; NANOINDENTATION MEASUREMENTS; REACTIVE MAGNETRON SPUTTERING;

SINGLE CRYSTALS;

EID: 18044397655     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1882752     Document Type: Article

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