The Young's modulus of chromium nitride films

Surface and Coatings Technology

Volumn 184, Issue 1, 2004, Pages 69-73

  Chen, Hong Ying ^a   Tsai, Cho Jen ^b   Lu, Fu Hsing ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Annealing; Chromium nitrides; Stress; X Ray diffraction; Young's modulus

Indexed keywords

ELASTIC MODULI; RESIDUAL STRESSES; STRESS RELAXATION; THIN FILMS;

DESTRUCTIVE TECHNIQUES; PLASMA DEPOSITION;

CHROMIUM COMPOUNDS;

COATING;

EID: 2642515513     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.064     Document Type: Article

References (21)

1. Markel E.J. Leaphart M.E.II Grant M.H. Encyclopedia of Chemical Technology 19 1996 John Wiley and Sons New York
2. Kral C. Lengauer W. Rafaja D. Ettmayer P. J. Alloy Compd. 265 1998 215
3. Perry A.J. Sue J.A. Martin P.J. Surf. Coat. Technol. 81 1996 17
4. Navinšek B. Panjan P. Surf. Coat. Technol. 59 1993 244
5. Jiang X. Reichelt K. Stritzker B. J. Appl. Phys. 66 1989 5805
6. Sue J.A. Perry A.J. Wetter J. Surf. Coat. Technol. 68-69 1994 126
7. Schneider D. Tucker M.D. Thin Solid Films 290-291 1996 305
8. Cunha L. Andritschky M. Pischow K. Wang Z. Thin Solid Films 355-356 1999 465
9. Attar F. Johannesson T. Thin Solid Films 258 1995 205
10. Wei G. Rar A. Barnard J.A. Thin Solid Films 398-399 2001 460
11. Flinn P.A. Gardner D.S. Nix W.D. IEEE Trans. Electron Dev. ED-34 1987 689
12. Cullity B.D. Elements of X-ray Diffraction 1978 Addison-Wesley Massachusetts
13. Hwang B.-H. Tu S.-F. Powder Diffr. 11 1996 276
14. Lu F.-H. Chen H.-Y. Thin Solid Films 398-399 2001 368
15. Stoney G.G. Proc. R. Soc. Lond. Ser. A 82 1909 172
16. Dieter G.E. Mechanical Metallurgy 1988 McGraw-Hill New York
17. Frantsevioh I.N. Zhurakovskii E.A. Lyashchenko A.B. Inorg. Mater. 3 1967 6
18. Holleck H. J. Vac. Sci. Technol. A 4 1986 2661
19. Brandes E.A. Brook G.B. Smithells Metals Reference Book 7th ed 1992 Butterworth-Heinemann Oxford
20. Nix W.D. Metall. Trans. A 20 1989 2217
21. Brantly W.A. J. Appl. Phys. 44 1973 534