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Volumn , Issue , 2007, Pages 1685-1689

Mechanical and electrical characterization of benzocyclobutene membrane packaging

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDES; ELECTRONICS PACKAGING; ENCAPSULATION; SILICON WAFERS; WSI CIRCUITS;

EID: 35348919370     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2007.374021     Document Type: Conference Paper
Times cited : (13)

References (12)
  • 1
    • 0141607125 scopus 로고    scopus 로고
    • A study on wafer-level vacuum packaging for MEMS devices
    • Byeungleul Lee, Seonho Seok and Kukjin Chun,"A study on wafer-level vacuum packaging for MEMS devices", J. Micromech. Microeng. 13, No. 5, 2003, pp. 663-669
    • (2003) J. Micromech. Microeng , vol.13 , Issue.5 , pp. 663-669
    • Lee, B.1    Seok, S.2    Chun, K.3
  • 3
    • 21044455665 scopus 로고    scopus 로고
    • A. Jourdain A, P. D. Moore, K. Baert, I. D. Wolf and H. A. C. Tilmans,Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices, J. Micromech. Microeng. 15, No. 7, 2005, pp. 89-96
    • A. Jourdain A, P. D. Moore, K. Baert, I. D. Wolf and H. A. C. Tilmans,"Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices", J. Micromech. Microeng. 15, No. 7, 2005, pp. 89-96
  • 5
    • 1642566508 scopus 로고    scopus 로고
    • J. Oberhammer, F. Niklaus and G. Stemme,Sealing of adhesive bonded devices on wafer level, Sensors and Actuators A: Physical, 110, Issues 1-3, 2004, pp. 407-412
    • J. Oberhammer, F. Niklaus and G. Stemme,"Sealing of adhesive bonded devices on wafer level", Sensors and Actuators A: Physical, Vol. 110, Issues 1-3, 2004, pp. 407-412
  • 6
    • 29144481015 scopus 로고    scopus 로고
    • Packaging for RF MEMS devices using LTCC substrate and BCB adhesive layer
    • Ki-IL Kim, Jung-Mu Kim, Gun-Chul Hwang, Chang-Wook Baek and Yong-Kweon Kim,"Packaging for RF MEMS devices using LTCC substrate and BCB adhesive layer", J. Micromech. Microeng, 16, No. 1,2006, pp. 150-156
    • (2006) J. Micromech. Microeng , vol.16 , Issue.1 , pp. 150-156
    • Kim, K.1    Kim, J.2    Hwang, G.3    Baek, C.4    Kim, Y.5
  • 9
    • 0041431012 scopus 로고    scopus 로고
    • Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities
    • J. Oberhammer, F. Nickaus and G. Stemme, "Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities", Sensors and Actuators, A 105, 2003, pp.297-304
    • (2003) Sensors and Actuators, A , vol.105 , pp. 297-304
    • Oberhammer, J.1    Nickaus, F.2    Stemme, G.3
  • 10
    • 18844397024 scopus 로고    scopus 로고
    • BCB contact, printing for patterned adhesive full-wafer bonded 0-level package
    • April
    • J. Oberhammer and G. Stemme, "BCB contact, printing for patterned adhesive full-wafer bonded 0-level package", Journal of Microelectromechanical systems, Vol. 14, No. 2, April 2005, pp.419-425
    • (2005) Journal of Microelectromechanical systems , vol.14 , Issue.2 , pp. 419-425
    • Oberhammer, J.1    Stemme, G.2
  • 12
    • 34248226326 scopus 로고    scopus 로고
    • Design, Fabrication and Measurement of BCB Polymer Zero-Level Packaging for Millimeter-Wave Applications
    • in press
    • S. Seok, N. Rolland and P. -A. Rolland, "Design, Fabrication and Measurement of BCB Polymer Zero-Level Packaging for Millimeter-Wave Applications", IEEE Transactions on Microwave Theory and Techniques, 2007, in press.
    • (2007) IEEE Transactions on Microwave Theory and Techniques
    • Seok, S.1    Rolland, N.2    Rolland, P.-A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.