N-O related shallow donors in silicon: Stoichiometry investigations

Applied Physics Letters

Volumn 91, Issue 15, 2007, Pages

  Wagner, H E ^a   Alt, H Ch ^a   Von Ammon, W ^b   Bittersberger, F ^b   Huber, A ^b   Koester, L ^b  

^a MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); LIGHT ABSORPTION; OXYGEN; SILICON; STOICHIOMETRY;

NITROGEN CONCENTRATION; OXYGEN ATOMS; SHALLOW DONORS;

CRYSTAL DEFECTS;

EID: 35248820115     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2795801     Document Type: Article

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