Modeling extreme ultraviolet/H 2 O oxidation of ruthenium optic coatings

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 118-130

  Hollenshead, Jeromy ^a   Klebanoff, Leonard ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EUV OPTICS; MOLECULAR DIFFUSION; WATER PARTIAL PRESSURE; WATER VAPOR;

COMPLEXATION; MATHEMATICAL MODELS; RUTHENIUM COMPOUNDS; ULTRAVIOLET RADIATION; VAPORS; WATER;

OXIDATION;

EID: 31544472380     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2150225     Document Type: Article

References (19)

1. M. E. Malinowski, C. E. Steinhaus, D. E. Meeker, W. M. Clift, L. E. Klebanoff, and S. Bajt, Proc. SPIE 5040, 477 (2003).
2. P. A. Grunow, L. E. Klebanoff, S. Graham, Jr., S. J. Haney, and W. M. Clift, Proc. SPIE 5040, 466 (2003).
3. J. T. Hollenshead and L. E. Klebanoff, J. Vac. Sci. Technol. B (accepted).
4. M. E. Malinowski, P. A. Grunow, C. E. Steinhaus, W. M. Clift, and L. E. Klebanoff, Proc. SPIE 4343, 347 (2001).
5. L. E. Klebanoff and R. H. Stulen, U. S. Patent No. 6,533,952 (18 March 2003).
6. A. D. Bass and L. Sanche, Radiat. Environ. Biophys. 37, 243 (1998).
7. P. A. Thiel and T. E. Madey, Surf. Sci. Rep. 0167-5729 7, 262 (1987); see also, D. L. Doering and T. E. Madey, Surf. Sci. 123, 305 (1982).
8. P. A. Thiel and T. E. Madey, Surf. Sci. Rep. 0167-5729 7, 262 (1987); see also, D. L. Doering and T. E. Madey, Surf. Sci. 123, 305 (1982).
9. Center for X-ray Optics (CXRO) of the Lawrence Berkeley National Laboratory, http://www-cxro.lbl.gov/optical_constants/
10. R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomena (Wiley, New York, 1960).
11. C. Benvenitu, CERN Reports 99, 43 (1999).
12. Y. Lilach, V. Bush, and M. Asscher, J. Chem. Phys. 119, 11899 (2001).
13. W. W. Smeltzer and D. J. Young, Prog. Solid State Chem. 10-1, 17 (1975).
14. J. Gegner, G. Horz, and R. Kirchheim, Interface Sci. 5, 231 (1997).
15. A. Bottcher, H. Conrad, and H. Niehus, J. Chem. Phys. 112, 4779 (2000).
16. W. M. Clift, L. E. Klebanoff, C. Tarrio, S. Grantham, O. R. Wood, S. Wurm, and N. V. Edwards, Proc. SPIE 5374, 666 (2004).
17. D. Buchenauer, W. M. Clift, K. Williams, and L. E. Klebanoff, status report for International SEMATECH Project LITH 160, Sandia National Laboratories, 2004 (unpublished).
18. M. E. Malinowski, C. E. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli, Proc. SPIE 4688, 442 (2002).
19. T. E. Madey (private communication).